JPS6356195B2 - - Google Patents

Info

Publication number

JPS6356195B2

JPS6356195B2 JP16076987A JP16076987A JPS6356195B2 JP S6356195 B2 JPS6356195 B2 JP S6356195B2 JP 16076987 A JP16076987 A JP 16076987A JP 16076987 A JP16076987 A JP 16076987A JP S6356195 B2 JPS6356195 B2 JP S6356195B2

Authority

JP

Japan

Prior art keywords

silicon carbide

copper

ceramics

metallized layer

layer

Prior art date

1987-06-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000000919 ceramic Substances 0.000 claims description 29
• 238000000034 method Methods 0.000 claims description 22
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 20
• 229910010271 silicon carbide Inorganic materials 0.000 claims description 14
• QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 13
• 229910052581 Si3N4 Inorganic materials 0.000 claims description 12
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 12
• 239000005751 Copper oxide Substances 0.000 claims description 11
• 229910000431 copper oxide Inorganic materials 0.000 claims description 11
• OMZSGWSJDCOLKM-UHFFFAOYSA-N copper(II) sulfide Chemical compound [S-2].[Cu+2] OMZSGWSJDCOLKM-UHFFFAOYSA-N 0.000 claims description 11
• 239000012298 atmosphere Substances 0.000 claims description 10
• 239000000203 mixture Substances 0.000 claims description 10
• 230000001590 oxidative effect Effects 0.000 claims description 6
• 239000010410 layer Substances 0.000 description 24
• 239000011247 coating layer Substances 0.000 description 12
• 238000005299 abrasion Methods 0.000 description 8
• 239000000853 adhesive Substances 0.000 description 8
• 230000001070 adhesive effect Effects 0.000 description 8
• 238000010438 heat treatment Methods 0.000 description 8
• 229910052751 metal Inorganic materials 0.000 description 8
• 239000002184 metal Substances 0.000 description 8
• 239000000843 powder Substances 0.000 description 6
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
• LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
• 239000011248 coating agent Substances 0.000 description 5
• 238000000576 coating method Methods 0.000 description 5
• 229910052802 copper Inorganic materials 0.000 description 5
• 239000010949 copper Substances 0.000 description 5
• 239000005749 Copper compound Substances 0.000 description 4
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
• 150000001880 copper compounds Chemical class 0.000 description 4
• 239000000463 material Substances 0.000 description 4
• 239000002904 solvent Substances 0.000 description 4
• 235000007173 Abies balsamea Nutrition 0.000 description 3
• 239000004857 Balsam Substances 0.000 description 3
• 244000018716 Impatiens biflora Species 0.000 description 3
• OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
• LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
• WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 2
• CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
• 238000005219 brazing Methods 0.000 description 2
• 238000007796 conventional method Methods 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 238000007654 immersion Methods 0.000 description 2
• 238000001465 metallisation Methods 0.000 description 2
• 150000002739 metals Chemical class 0.000 description 2
• 230000035515 penetration Effects 0.000 description 2
• -1 sialon Chemical compound 0.000 description 2
• 229910000679 solder Inorganic materials 0.000 description 2
• ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 description 1
• UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 1
• UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
• VCUFZILGIRCDQQ-KRWDZBQOSA-N N-[[(5S)-2-oxo-3-(2-oxo-3H-1,3-benzoxazol-6-yl)-1,3-oxazolidin-5-yl]methyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical group O=C1O[C@H](CN1C1=CC2=C(NC(O2)=O)C=C1)CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F VCUFZILGIRCDQQ-KRWDZBQOSA-N 0.000 description 1
• NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
• PCEXQRKSUSSDFT-UHFFFAOYSA-N [Mn].[Mo] Chemical compound [Mn].[Mo] PCEXQRKSUSSDFT-UHFFFAOYSA-N 0.000 description 1
• 230000004075 alteration Effects 0.000 description 1
• 239000011230 binding agent Substances 0.000 description 1
• 229910002091 carbon monoxide Inorganic materials 0.000 description 1
• 239000004020 conductor Substances 0.000 description 1
• PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
• 229910052878 cordierite Inorganic materials 0.000 description 1
• 238000000354 decomposition reaction Methods 0.000 description 1
• JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
• KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 150000004678 hydrides Chemical class 0.000 description 1
• 229910052739 hydrogen Inorganic materials 0.000 description 1
• 239000001257 hydrogen Substances 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 239000000395 magnesium oxide Substances 0.000 description 1
• 229910052863 mullite Inorganic materials 0.000 description 1
• 229910052759 nickel Inorganic materials 0.000 description 1
• 229910052757 nitrogen Inorganic materials 0.000 description 1
• 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
• 239000011225 non-oxide ceramic Substances 0.000 description 1
• 239000003921 oil Substances 0.000 description 1
• 229910052574 oxide ceramic Inorganic materials 0.000 description 1
• 239000011224 oxide ceramic Substances 0.000 description 1
• 238000007747 plating Methods 0.000 description 1
• BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1
• 230000003014 reinforcing effect Effects 0.000 description 1
• 239000004576 sand Substances 0.000 description 1
• 230000035939 shock Effects 0.000 description 1
• 229910001958 silver carbonate Inorganic materials 0.000 description 1
• LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 description 1
• 239000000126 substance Substances 0.000 description 1
• 229910052717 sulfur Inorganic materials 0.000 description 1
• 239000011593 sulfur Substances 0.000 description 1