JPS63282195A - エピタキシャル成長装置の原料ガス吹出ノズル - Google Patents

エピタキシャル成長装置の原料ガス吹出ノズル

Info

Publication number
JPS63282195A
JPS63282195A JP11672887A JP11672887A JPS63282195A JP S63282195 A JPS63282195 A JP S63282195A JP 11672887 A JP11672887 A JP 11672887A JP 11672887 A JP11672887 A JP 11672887A JP S63282195 A JPS63282195 A JP S63282195A
Authority
JP
Japan
Prior art keywords
silicon
nozzle
epitaxial growth
quartz
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11672887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0458436B2 (OSRAM
Inventor
Yoshihiko Saito
芳彦 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP11672887A priority Critical patent/JPS63282195A/ja
Publication of JPS63282195A publication Critical patent/JPS63282195A/ja
Publication of JPH0458436B2 publication Critical patent/JPH0458436B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP11672887A 1987-05-15 1987-05-15 エピタキシャル成長装置の原料ガス吹出ノズル Granted JPS63282195A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11672887A JPS63282195A (ja) 1987-05-15 1987-05-15 エピタキシャル成長装置の原料ガス吹出ノズル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11672887A JPS63282195A (ja) 1987-05-15 1987-05-15 エピタキシャル成長装置の原料ガス吹出ノズル

Publications (2)

Publication Number Publication Date
JPS63282195A true JPS63282195A (ja) 1988-11-18
JPH0458436B2 JPH0458436B2 (OSRAM) 1992-09-17

Family

ID=14694327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11672887A Granted JPS63282195A (ja) 1987-05-15 1987-05-15 エピタキシャル成長装置の原料ガス吹出ノズル

Country Status (1)

Country Link
JP (1) JPS63282195A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000182967A (ja) * 1998-12-15 2000-06-30 Sony Corp 気相成長方法および気相成長装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000182967A (ja) * 1998-12-15 2000-06-30 Sony Corp 気相成長方法および気相成長装置

Also Published As

Publication number Publication date
JPH0458436B2 (OSRAM) 1992-09-17

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