JPS6327846B2 - - Google Patents

Info

Publication number
JPS6327846B2
JPS6327846B2 JP57189097A JP18909782A JPS6327846B2 JP S6327846 B2 JPS6327846 B2 JP S6327846B2 JP 57189097 A JP57189097 A JP 57189097A JP 18909782 A JP18909782 A JP 18909782A JP S6327846 B2 JPS6327846 B2 JP S6327846B2
Authority
JP
Japan
Prior art keywords
film
annealing
semiconductor substrate
furnace
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57189097A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5979522A (ja
Inventor
Hiroshi Matsui
Yutaka Yuge
Tomoaki Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP57189097A priority Critical patent/JPS5979522A/ja
Publication of JPS5979522A publication Critical patent/JPS5979522A/ja
Publication of JPS6327846B2 publication Critical patent/JPS6327846B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P30/20—

Landscapes

  • Formation Of Insulating Films (AREA)
JP57189097A 1982-10-29 1982-10-29 半導体装置の製造方法 Granted JPS5979522A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57189097A JPS5979522A (ja) 1982-10-29 1982-10-29 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57189097A JPS5979522A (ja) 1982-10-29 1982-10-29 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5979522A JPS5979522A (ja) 1984-05-08
JPS6327846B2 true JPS6327846B2 (OSRAM) 1988-06-06

Family

ID=16235291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57189097A Granted JPS5979522A (ja) 1982-10-29 1982-10-29 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5979522A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04105034A (ja) * 1990-08-24 1992-04-07 Matsushita Electric Ind Co Ltd 圧電型圧力センサ

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60249319A (ja) * 1984-05-24 1985-12-10 Mitsubishi Electric Corp 半導体装置の製造方法
JPS62188374A (ja) * 1986-02-14 1987-08-17 Fuji Electric Co Ltd 絶縁ゲ−ト電界効果トランジスタの製造方法
JPS63114121A (ja) * 1986-07-07 1988-05-19 Nec Corp 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5927524A (ja) * 1982-08-07 1984-02-14 Mitsubishi Electric Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04105034A (ja) * 1990-08-24 1992-04-07 Matsushita Electric Ind Co Ltd 圧電型圧力センサ

Also Published As

Publication number Publication date
JPS5979522A (ja) 1984-05-08

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