JPS6327784Y2 - - Google Patents
Info
- Publication number
- JPS6327784Y2 JPS6327784Y2 JP1980133267U JP13326780U JPS6327784Y2 JP S6327784 Y2 JPS6327784 Y2 JP S6327784Y2 JP 1980133267 U JP1980133267 U JP 1980133267U JP 13326780 U JP13326780 U JP 13326780U JP S6327784 Y2 JPS6327784 Y2 JP S6327784Y2
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- processing
- substrate
- workpiece
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 21
- 239000000126 substance Substances 0.000 claims description 19
- 238000012545 processing Methods 0.000 claims description 18
- 238000012993 chemical processing Methods 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 description 27
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000007664 blowing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980133267U JPS6327784Y2 (US20050065096A1-20050324-C00034.png) | 1980-09-19 | 1980-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980133267U JPS6327784Y2 (US20050065096A1-20050324-C00034.png) | 1980-09-19 | 1980-09-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5758435U JPS5758435U (US20050065096A1-20050324-C00034.png) | 1982-04-06 |
| JPS6327784Y2 true JPS6327784Y2 (US20050065096A1-20050324-C00034.png) | 1988-07-27 |
Family
ID=29493492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980133267U Expired JPS6327784Y2 (US20050065096A1-20050324-C00034.png) | 1980-09-19 | 1980-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6327784Y2 (US20050065096A1-20050324-C00034.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3808709B2 (ja) * | 2000-07-19 | 2006-08-16 | 大日本スクリーン製造株式会社 | 基板処理装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093775A (US20050065096A1-20050324-C00034.png) * | 1973-12-19 | 1975-07-26 | ||
| JPS53144265A (en) * | 1977-05-23 | 1978-12-15 | Hitachi Ltd | Etching device |
| JPS5433676A (en) * | 1977-08-22 | 1979-03-12 | Hitachi Ltd | Wafer processing unit |
| JPS5529579A (en) * | 1979-08-16 | 1980-03-01 | Denki Kagaku Kogyo Kk | Polymerization of vinyl chloride |
-
1980
- 1980-09-19 JP JP1980133267U patent/JPS6327784Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093775A (US20050065096A1-20050324-C00034.png) * | 1973-12-19 | 1975-07-26 | ||
| JPS53144265A (en) * | 1977-05-23 | 1978-12-15 | Hitachi Ltd | Etching device |
| JPS5433676A (en) * | 1977-08-22 | 1979-03-12 | Hitachi Ltd | Wafer processing unit |
| JPS5529579A (en) * | 1979-08-16 | 1980-03-01 | Denki Kagaku Kogyo Kk | Polymerization of vinyl chloride |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5758435U (US20050065096A1-20050324-C00034.png) | 1982-04-06 |
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