JPS5433676A - Wafer processing unit - Google Patents
Wafer processing unitInfo
- Publication number
- JPS5433676A JPS5433676A JP9959077A JP9959077A JPS5433676A JP S5433676 A JPS5433676 A JP S5433676A JP 9959077 A JP9959077 A JP 9959077A JP 9959077 A JP9959077 A JP 9959077A JP S5433676 A JPS5433676 A JP S5433676A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing unit
- wafer processing
- placing
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To make uniform the effect of processing, by placing the rotary roller at the bottom of the processing vessel including etching solution, placing the wafer tool of box shape having opening at the bottom and the wafer containing grooves longitudinally equal distance on the inner wall, and by turning the wafer projected in the roller.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9959077A JPS5433676A (en) | 1977-08-22 | 1977-08-22 | Wafer processing unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9959077A JPS5433676A (en) | 1977-08-22 | 1977-08-22 | Wafer processing unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5433676A true JPS5433676A (en) | 1979-03-12 |
Family
ID=14251300
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9959077A Pending JPS5433676A (en) | 1977-08-22 | 1977-08-22 | Wafer processing unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5433676A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5667752U (en) * | 1979-10-27 | 1981-06-05 | ||
JPS5758435U (en) * | 1980-09-19 | 1982-04-06 | ||
JPS6052624U (en) * | 1983-09-16 | 1985-04-13 | 富士通株式会社 | cleaning equipment |
JPS631328U (en) * | 1986-06-23 | 1988-01-07 | ||
US4897369A (en) * | 1987-06-29 | 1990-01-30 | SGS-Thompson Microelectronics S.p.A. | Method for shaping the edges of slices of semiconductor material |
JPH04151837A (en) * | 1990-10-16 | 1992-05-25 | Shin Etsu Handotai Co Ltd | Etching equipment |
-
1977
- 1977-08-22 JP JP9959077A patent/JPS5433676A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5667752U (en) * | 1979-10-27 | 1981-06-05 | ||
JPS5758435U (en) * | 1980-09-19 | 1982-04-06 | ||
JPS6327784Y2 (en) * | 1980-09-19 | 1988-07-27 | ||
JPS6052624U (en) * | 1983-09-16 | 1985-04-13 | 富士通株式会社 | cleaning equipment |
JPS631328U (en) * | 1986-06-23 | 1988-01-07 | ||
US4897369A (en) * | 1987-06-29 | 1990-01-30 | SGS-Thompson Microelectronics S.p.A. | Method for shaping the edges of slices of semiconductor material |
JPH04151837A (en) * | 1990-10-16 | 1992-05-25 | Shin Etsu Handotai Co Ltd | Etching equipment |
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