JPS5758435U - - Google Patents

Info

Publication number
JPS5758435U
JPS5758435U JP13326780U JP13326780U JPS5758435U JP S5758435 U JPS5758435 U JP S5758435U JP 13326780 U JP13326780 U JP 13326780U JP 13326780 U JP13326780 U JP 13326780U JP S5758435 U JPS5758435 U JP S5758435U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13326780U
Other languages
Japanese (ja)
Other versions
JPS6327784Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980133267U priority Critical patent/JPS6327784Y2/ja
Publication of JPS5758435U publication Critical patent/JPS5758435U/ja
Application granted granted Critical
Publication of JPS6327784Y2 publication Critical patent/JPS6327784Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Weting (AREA)
JP1980133267U 1980-09-19 1980-09-19 Expired JPS6327784Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980133267U JPS6327784Y2 (en) 1980-09-19 1980-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980133267U JPS6327784Y2 (en) 1980-09-19 1980-09-19

Publications (2)

Publication Number Publication Date
JPS5758435U true JPS5758435U (en) 1982-04-06
JPS6327784Y2 JPS6327784Y2 (en) 1988-07-27

Family

ID=29493492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980133267U Expired JPS6327784Y2 (en) 1980-09-19 1980-09-19

Country Status (1)

Country Link
JP (1) JPS6327784Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002100605A (en) * 2000-07-19 2002-04-05 Dainippon Screen Mfg Co Ltd Substrate-processing apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5093775A (en) * 1973-12-19 1975-07-26
JPS53144265A (en) * 1977-05-23 1978-12-15 Hitachi Ltd Etching device
JPS5433676A (en) * 1977-08-22 1979-03-12 Hitachi Ltd Wafer processing unit
JPS5529579A (en) * 1979-08-16 1980-03-01 Denki Kagaku Kogyo Kk Polymerization of vinyl chloride

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5093775A (en) * 1973-12-19 1975-07-26
JPS53144265A (en) * 1977-05-23 1978-12-15 Hitachi Ltd Etching device
JPS5433676A (en) * 1977-08-22 1979-03-12 Hitachi Ltd Wafer processing unit
JPS5529579A (en) * 1979-08-16 1980-03-01 Denki Kagaku Kogyo Kk Polymerization of vinyl chloride

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002100605A (en) * 2000-07-19 2002-04-05 Dainippon Screen Mfg Co Ltd Substrate-processing apparatus

Also Published As

Publication number Publication date
JPS6327784Y2 (en) 1988-07-27

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