JPS631328U - - Google Patents
Info
- Publication number
- JPS631328U JPS631328U JP9459086U JP9459086U JPS631328U JP S631328 U JPS631328 U JP S631328U JP 9459086 U JP9459086 U JP 9459086U JP 9459086 U JP9459086 U JP 9459086U JP S631328 U JPS631328 U JP S631328U
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- ultrasonic
- support mechanism
- cleaning machine
- ultrasonic waves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000004506 ultrasonic cleaning Methods 0.000 claims 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
図面は本考案実施例の縦断面図である。
１…洗浄槽、２…超音波振動子、３…回転機構
、４…ウエハー、５…キヤリヤ、６…従来洗浄で
きなかつた部分。
The drawing is a longitudinal sectional view of an embodiment of the present invention. 1...Cleaning tank, 2...Ultrasonic vibrator, 3...Rotating mechanism, 4...Wafer, 5...Carrier, 6...Parts that could not be cleaned conventionally.
Claims (1)
物を支持機構により支持して超音波により洗浄を
行う超音波洗浄機において、前記被洗浄物の如何
なる部分に対しても、少なくとも或る期間は前記
超音波振動子からの超音波が、前記支持機構に遮
蔽されずに照射されるよう、前記被洗浄物を前記
支持機構に対して相対的に移動せしめる移動機構
を備えていることを特徴とする超音波洗浄機。 In an ultrasonic cleaning machine in which an object to be cleaned is supported by a support mechanism in a cleaning tank equipped with an ultrasonic vibrator and cleaned by ultrasonic waves, any part of the object to be cleaned is cleaned for at least a certain period of time. is characterized by comprising a moving mechanism that moves the object to be cleaned relative to the support mechanism so that the ultrasonic waves from the ultrasonic transducer are irradiated without being blocked by the support mechanism. Ultrasonic cleaning machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9459086U JPS631328U (en) | 1986-06-23 | 1986-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9459086U JPS631328U (en) | 1986-06-23 | 1986-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS631328U true JPS631328U (en) | 1988-01-07 |
Family
ID=30958202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9459086U Pending JPS631328U (en) | 1986-06-23 | 1986-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS631328U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5433676A (en) * | 1977-08-22 | 1979-03-12 | Hitachi Ltd | Wafer processing unit |
| JPS59142885A (en) * | 1983-02-07 | 1984-08-16 | 株式会社日立製作所 | Ultrasonic treating method and apparatus |
-
1986
- 1986-06-23 JP JP9459086U patent/JPS631328U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5433676A (en) * | 1977-08-22 | 1979-03-12 | Hitachi Ltd | Wafer processing unit |
| JPS59142885A (en) * | 1983-02-07 | 1984-08-16 | 株式会社日立製作所 | Ultrasonic treating method and apparatus |