JPS63277549A - 超伝導セラミックスペ−スト組成物 - Google Patents

超伝導セラミックスペ−スト組成物

Info

Publication number
JPS63277549A
JPS63277549A JP62110718A JP11071887A JPS63277549A JP S63277549 A JPS63277549 A JP S63277549A JP 62110718 A JP62110718 A JP 62110718A JP 11071887 A JP11071887 A JP 11071887A JP S63277549 A JPS63277549 A JP S63277549A
Authority
JP
Japan
Prior art keywords
weight
parts
volatile solvent
ceramic
superconductive ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62110718A
Other languages
English (en)
Inventor
Hirozo Yokoyama
横山 博三
Hitoshi Suzuki
均 鈴木
Nobuo Kamehara
亀原 伸男
Koichi Niwa
丹羽 紘一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62110718A priority Critical patent/JPS63277549A/ja
Priority to DE3853316T priority patent/DE3853316T2/de
Priority to EP88304129A priority patent/EP0290271B1/en
Priority to CN88102627A priority patent/CN1040937C/zh
Publication of JPS63277549A publication Critical patent/JPS63277549A/ja
Priority to US07/268,195 priority patent/US5081070A/en
Priority to CN91101166A priority patent/CN1059349A/zh
Priority to US08/064,668 priority patent/US5286713A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4846Leads on or in insulating or insulated substrates, e.g. metallisation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00Layered products essentially comprising ceramics, e.g. refractory products
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/45Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides
    • C04B35/4504Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides containing rare earth oxides
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/45Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides
    • C04B35/4512Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides containing thallium oxide
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/45Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides
    • C04B35/4521Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides containing bismuth oxide
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/005Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/006Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76886Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
    • H01L21/76891Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances by using superconducting materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49866Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
    • H01L23/49888Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials the conductive materials containing superconducting material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming superconductor layers
    • H10N60/0352Processes for depositing or forming superconductor layers from a suspension or slurry, e.g. screen printing; doctor blade casting
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/48Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
    • C04B2235/483Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567Treatment time
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04Ceramic interlayers
    • C04B2237/06Oxidic interlayers
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04Ceramic interlayers
    • C04B2237/06Oxidic interlayers
    • C04B2237/066Oxidic interlayers based on rare earth oxides
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04Ceramic interlayers
    • C04B2237/09Ceramic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12Metallic interlayers
    • C04B2237/125Metallic interlayers based on noble metals, e.g. silver
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic
    • C04B2237/34Oxidic
    • C04B2237/343Alumina or aluminates
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/59Aspects relating to the structure of the interlayer
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/68Forming laminates or joining articles wherein at least one substrate contains at least two different parts of macro-size, e.g. one ceramic substrate layer containing an embedded conductor or electrode
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701Low temperature co-fired ceramic [LTCC]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/901Printed circuit
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/922Static electricity metal bleed-off metallic stock
    • Y10S428/9265Special properties
    • Y10S428/93Electric superconducting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
    • Y10S505/702Josephson junction present
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
    • Y10S505/703Microelectronic device with superconducting conduction line
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/704Wire, fiber, or cable
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 〔概 要〕 超伝導セラミックス成分粉末100重量部に対して、有
機成分が、結合剤0.5〜10重量部、難揮発性溶剤5
〜30重量部および揮発性溶剤10〜30重量部の他に
、TiまたはSiを含むカップリング剤0.1〜10重
量部を含む超伝導セラミックスペースト組成物。
〔産業上の利用分野〕
本発明は高速電算機用多層回路基板の導体層の形成に使
用することができる超伝導セラミックスペースト組成物
に関する。
〔従来の技術〕
高速電算機用回路基板は信号を効率よく伝送するために
、絶縁材料は誘電率が低いこと、導体材料は電気抵抗が
低いことが要求される。従来は導体材料を銅とする多層
セラミック回路基板が使用されていた。
近年、酸化物超伝導材料が注目されるようになり、たと
えば、La −Ba −Cu−0系、La −3r −
Cu−0系、Y−Ba−Cu−0系などが研究されてい
る。
このような酸化物を導体材料として、回路基板を作製す
るのに、ガラス−セラミックスグリーンシート上に超伝
導セラミックスペーストをスクリーン印刷し、これを積
層して焼成する方法が考えられている。
〔発明が解決しようとする問題点〕
ガラスーセラミックスグリーンシート上に超伝導セラミ
ックスペーストをスクリーン印刷したものは相互のぬれ
性が悪いので、積層して焼成した回路基板はガラス−セ
ラミックス層と超伝導セラミックス層との密着性が弱い
〔問題点を解決するための手段〕
上記問題点は、超伝導セラミックス成分粉末と有機成分
とを含む超伝導セラミックスペースト組成物であって、
超伝導セラミックス成分粉末100重量部に対して、有
機成分が、結合剤0.5〜10重量部、難揮発性溶剤5
〜30重量部および揮発性溶剤10〜30重量部の他に
、TiまたはSiを含むカップリング剤001〜10重
量部を含むことを特徴とする組成物によって解決するこ
とができる。
〔作 用〕
カップリング剤が無機質粉末と有機質結合剤との間のぬ
れ性を向上することは周知の技術である。
発明者は、TiまたはSiを含むカップリング剤の適量
を含む超伝導セラミックスペーストを、ガラス−セラミ
ックスグリーンシートにスクリーン印刷すると、ペース
トとグリーンシートとの間のぬれ性が向上するので、積
層し、焼成した多層回路基板の導電層と絶縁層との間の
密着性を高めるばかりでなく、導電層の超伝導性を少な
くとも阻害しないことを見出した。
超伝導セラミックス成分粉末100重量部に対する添加
量は、カップリング剤が0.1重量部未満では密着強度
の向上に効果がなく、10重量部を超えると粘度が著し
く高くなって過剰な溶剤が必要となり、スクリーン印刷
後の形状保持が困難とな゛る。また、この範囲を外れる
と、得られた超伝導ペーストをスクリーン印刷して焼成
した回路基板の歩留りが低下する。結合剤が0.5重・
量%未満ではセラミック成分粉末を十分に結合できず、
10重量%を超えると乾燥後の形状保持が困難となり、
難揮発性溶剤が5重量部未満ではペースト粘度が高くな
り印刷が困難となり、30重量部より多いと粘度が低く
すぎて印刷が困難となる。揮発性溶剤が10重量部未満
ではセラミックス粉末を均一に分散させることが困難で
あり、30重量部を超えると、ペースト作製1(で時間
がかかる。
超伝導セラミックス成分は、焼成後に、一般式1式% (式中、Aは周期律表第11a族のBa、Ca、Srお
よびMgから選択された少なくとも1つのアルカリ土類
元素、Rは周期律表第mb族のSc+Y。
La、 Ce、 Pr+ Nd、 Ss、 Eu+ G
d+ Tb+ Dy、 Ho+ Er。
Tm、YbおよびLuから選択された少なくとも1つの
希土類元素、Mが周期律表第1b族のCu。
Ag、およびAuから選択された少なくとも1つの銅族
元素を表わし、0が酸素である)で示されるセラミック
スを形成する酸化物または酸素酸塩が好ましい。
〔実施例〕
実施土工 超伝導セラミックス成分粉末として、粒径1趨のBaC
O5O,6モルと、粒径1趨のYzo、 0.4モルと
、粒径2趨のCu01モルとをボールミルで48時間混
合した。この混合粉末100重量部に、結合剤ポリメチ
ルメタクリレート樹脂3重量部、難揮発性溶剤テルピネ
オール20部、Tiを含むカンプリング剤(味の素製、
KR−QS) 5重量部および揮発性溶剤メチルエチル
ケトン20重量部を添加して、ボールミルで72時間混
合した。この混合物をめのう乳鉢で1.5時間混練し、
さらに三本ロールミルで30回混練して超伝導セラミッ
クスペースト組成物を作製した。
はうけい酸ガラス50重量部とアルミナ50重量部とを
含む厚み0.2鶴のガラス−セラミックスグリーンシー
トをポリエステルフィルム上に成形し、24時間自然乾
燥させた後、直径0.1 snのスルーホールを明け、
さきに作製した超伝導セラミックスペーストを充填し、
80℃で20分間乾燥した。このペーストを充填したグ
リーンシートに、さらにペーストをスクリーン印刷して
導体パターンを形成し、このグリーンシート10枚を重
ねて300 kg / codに加圧し130℃で積層
した。これを870℃で4時間予備焼成した後、102
0℃で4時間本焼成して多層セラミックス回路基板を作
製した。
この基板を液体窒素に浸漬して、導体層の電気抵抗を測
定した結果、ゼロを示した。
また、−面にペーストを付着させて焼成した基板の部分
を15X15mに切断し、導体層をはさむ絶縁層の外面
に治具を接着して、引張り試験を行なったところ、導体
層と絶縁層との密着力は3kg/f12以上であった。
皇施握主 Tiを含むカップリング剤の代りに、Siを含むカンプ
リング剤(日本ユニカ製A −187) 5重量部を添
加したことの他は、実施例1と同様にして多層セラミッ
クス回路基板を作製した。この基板の導体層の電気抵抗
、および導体層と絶縁層との間の密着力は実施例1と同
様の値を示した。
止較侃 カップリング剤を使用しないことの他は、実施例1と同
様にして多層セラミックス回路基板を作製した。この基
板の導体層と絶縁層との間の密着力は0.1眩/112
であった。
〔発明の効果〕
超伝導セラミックスペーストにTiまたはSiを含むカ
ップリング剤の適量を添加することによって、導体層の
超伝導性を少なくとも損なうことなく、導体層と絶縁層
との間の密着力の大きい超伝導セラミックス回路基板を
製造することができる。

Claims (1)

  1. 【特許請求の範囲】 1、超伝導セラミックス成分粉末と有機成分とを含む超
    伝導セラミックスペースト組成物であって、 超伝導セラミックス成分粉末100重量部に対して、有
    機成分が、結合剤0.5〜10重量部、難揮発性溶剤5
    〜30重量部および揮発性溶剤10〜30重量部の他に
    、TiまたはSiを含むカップリング剤0.1〜10重
    量部を含むことを特徴とする組成物。 2、超伝導セラミックス成分が、焼成後に、一般式 A_0_._5_〜_1_._8R_0_._2_〜_
    2MO_2_〜_5(式中、Aは周期律表第IIa族のB
    a、Ca、SrおよびMgから選択された少なくとも1
    つのアルカリ土類元素、Rは周期律表第IIIb族のSc
    、Y、La、Ce、Pr、Nd、Sm、Eu、Gd、T
    b、Dy、Ho、Er、Tm、YbおよびLuから選択
    された少なくとも1つの希土類元素、Mが周期律表第
    I b族のCu、Ag、およびAuから選択された少なく
    とも1つの銅族元素を表わし、Oが酸素である)で示さ
    れるセラミックスを形成する酸化物または酸素酸塩であ
    る、特許請求の範囲第1項記載の組成物。
JP62110718A 1987-05-08 1987-05-08 超伝導セラミックスペ−スト組成物 Pending JPS63277549A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP62110718A JPS63277549A (ja) 1987-05-08 1987-05-08 超伝導セラミックスペ−スト組成物
DE3853316T DE3853316T2 (de) 1987-05-08 1988-05-06 Supraleitende Schaltungskarte und Verfahren zu ihrer Herstellung.
EP88304129A EP0290271B1 (en) 1987-05-08 1988-05-06 Superconducting circuit board and process of manufacturing it
CN88102627A CN1040937C (zh) 1987-05-08 1988-05-07 超导电路板
US07/268,195 US5081070A (en) 1987-05-08 1989-01-30 Superconducting circuit board and paste adopted therefor
CN91101166A CN1059349A (zh) 1987-05-08 1991-02-23 一种用于形成超导陶瓷薄膜的涂料
US08/064,668 US5286713A (en) 1987-05-08 1993-05-21 Method for manufacturing an oxide superconducting circuit board by printing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62110718A JPS63277549A (ja) 1987-05-08 1987-05-08 超伝導セラミックスペ−スト組成物

Publications (1)

Publication Number Publication Date
JPS63277549A true JPS63277549A (ja) 1988-11-15

Family

ID=14542724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62110718A Pending JPS63277549A (ja) 1987-05-08 1987-05-08 超伝導セラミックスペ−スト組成物

Country Status (2)

Country Link
US (1) US5081070A (ja)
JP (1) JPS63277549A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63277514A (ja) * 1987-05-08 1988-11-15 Koujiyundo Kagaku Kenkyusho:Kk 酸化物超電導体材料
CN117069482A (zh) * 2023-08-15 2023-11-17 湖南省新化县恒生电子陶瓷有限责任公司 一种新能源汽车熔断器用氧化铝陶瓷及其制备方法

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2054796C (en) * 1990-11-01 1999-01-19 Hiroshi Inada Superconducting wiring lines and process for fabricating the same
JP3223199B2 (ja) * 1991-10-25 2001-10-29 ティーディーケイ株式会社 多層セラミック部品の製造方法および多層セラミック部品
JP3338527B2 (ja) * 1992-10-07 2002-10-28 富士通株式会社 高密度積層形のコネクタ、及び、コネクタの設計方法
JP3087152B2 (ja) * 1993-09-08 2000-09-11 富士通株式会社 樹脂フィルム多層回路基板の製造方法
US8238696B2 (en) 2003-08-21 2012-08-07 Microsoft Corporation Systems and methods for the implementation of a digital images schema for organizing units of information manageable by a hardware/software interface system
US7401104B2 (en) * 2003-08-21 2008-07-15 Microsoft Corporation Systems and methods for synchronizing computer systems through an intermediary file system share or device
US8166101B2 (en) * 2003-08-21 2012-04-24 Microsoft Corporation Systems and methods for the implementation of a synchronization schemas for units of information manageable by a hardware/software interface system
US7778962B2 (en) * 2004-04-30 2010-08-17 Microsoft Corporation Client store synchronization through intermediary store change packets
JP5208349B2 (ja) * 2004-09-03 2013-06-12 富士通株式会社 容量素子とその製造方法
US8315678B2 (en) * 2007-10-10 2012-11-20 D-Wave Systems Inc. Systems, methods, and apparatus for multilayer superconducting printed circuit boards
CN102822112B (zh) * 2010-03-30 2014-06-18 株式会社村田制作所 金属基基板及其制造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4835039A (en) * 1986-11-26 1989-05-30 Ceramics Process Systems Corporation Tungsten paste for co-sintering with pure alumina and method for producing same
CA1329952C (en) * 1987-04-27 1994-05-31 Yoshihiko Imanaka Multi-layer superconducting circuit substrate and process for manufacturing same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63277514A (ja) * 1987-05-08 1988-11-15 Koujiyundo Kagaku Kenkyusho:Kk 酸化物超電導体材料
CN117069482A (zh) * 2023-08-15 2023-11-17 湖南省新化县恒生电子陶瓷有限责任公司 一种新能源汽车熔断器用氧化铝陶瓷及其制备方法
CN117069482B (zh) * 2023-08-15 2024-02-02 湖南省新化县恒生电子陶瓷有限责任公司 一种新能源汽车熔断器用氧化铝陶瓷及其制备方法

Also Published As

Publication number Publication date
US5081070A (en) 1992-01-14

Similar Documents

Publication Publication Date Title
EP0275052B1 (en) Method for making a ceramic multilayer structure having internal copper conductors
US4812422A (en) Dielectric paste and method of manufacturing the paste
JPS63277549A (ja) 超伝導セラミックスペ−スト組成物
US6379579B1 (en) Method for the preparation of soft magnetic ferrite powder and method for the production of laminated chip inductor
JP2002536837A (ja) 埋め込みレジスタを備えた多層セラミック回路基板
MXPA01003349A (es) Inductores de alto valor encerrados en tableros ceramicos de circuitos co-activados a baja temperatura.
US5556585A (en) Dielectric ceramic body including TIO2 dispersion in crystallized cordierite matrix phase, method of producing the same, and circuit board using the same
EP0557470B1 (en) Low-firing capacitor dielectrics
CN101231908A (zh) 高电容密度嵌入式陶瓷电容器的制造方法
JP3678260B2 (ja) ガラスセラミックス組成物
JP4637017B2 (ja) セラミックス組成物及びセラミックス配線基板
JP3735228B2 (ja) 軟磁性フェライト粉末の製造方法および積層チップインダクタの製造方法
JPH06204022A (ja) フェライトペースト組成物および配線基板
JP2712031B2 (ja) 回路基板用組成物及びそれを使用した電子部品
JP2000211969A (ja) 低温焼成磁器およびこれを備えた電子部品
JPS623066A (ja) セラミツク組成物
JPS63271994A (ja) セラミツク配線基板
JPS63280488A (ja) 回路基板
JP2003095740A (ja) ガラスセラミック誘電体材料および焼結体
JPS625508A (ja) 導電ペ−スト
JPH0686327B2 (ja) セラミツク基板用組成物
JPS63265858A (ja) 多層基板用低温焼結磁器組成物
JPH02172106A (ja) 誘電体セラミック用組成物、誘電体セラミック焼結体および多層配線基板
JP3628146B2 (ja) 低温焼成磁器組成物および低温焼成磁器
JP2614050B2 (ja) 絶縁体磁器組成物