JPS6327034A - 半導体装置計測用プロ−ブ - Google Patents
半導体装置計測用プロ−ブInfo
- Publication number
- JPS6327034A JPS6327034A JP61170207A JP17020786A JPS6327034A JP S6327034 A JPS6327034 A JP S6327034A JP 61170207 A JP61170207 A JP 61170207A JP 17020786 A JP17020786 A JP 17020786A JP S6327034 A JPS6327034 A JP S6327034A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- electrodes
- die
- semiconductor device
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title claims abstract description 28
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 239000012212 insulator Substances 0.000 claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 3
- 239000000428 dust Substances 0.000 abstract description 2
- 239000000356 contaminant Substances 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61170207A JPS6327034A (ja) | 1986-07-18 | 1986-07-18 | 半導体装置計測用プロ−ブ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61170207A JPS6327034A (ja) | 1986-07-18 | 1986-07-18 | 半導体装置計測用プロ−ブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6327034A true JPS6327034A (ja) | 1988-02-04 |
| JPH0516665B2 JPH0516665B2 (OSRAM) | 1993-03-05 |
Family
ID=15900650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61170207A Granted JPS6327034A (ja) | 1986-07-18 | 1986-07-18 | 半導体装置計測用プロ−ブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6327034A (OSRAM) |
-
1986
- 1986-07-18 JP JP61170207A patent/JPS6327034A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0516665B2 (OSRAM) | 1993-03-05 |
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