JPH0516665B2 - - Google Patents
Info
- Publication number
- JPH0516665B2 JPH0516665B2 JP61170207A JP17020786A JPH0516665B2 JP H0516665 B2 JPH0516665 B2 JP H0516665B2 JP 61170207 A JP61170207 A JP 61170207A JP 17020786 A JP17020786 A JP 17020786A JP H0516665 B2 JPH0516665 B2 JP H0516665B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- die
- measuring
- electrode
- electrical characteristics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 31
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 10
- 239000012212 insulator Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61170207A JPS6327034A (ja) | 1986-07-18 | 1986-07-18 | 半導体装置計測用プロ−ブ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61170207A JPS6327034A (ja) | 1986-07-18 | 1986-07-18 | 半導体装置計測用プロ−ブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6327034A JPS6327034A (ja) | 1988-02-04 |
| JPH0516665B2 true JPH0516665B2 (OSRAM) | 1993-03-05 |
Family
ID=15900650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61170207A Granted JPS6327034A (ja) | 1986-07-18 | 1986-07-18 | 半導体装置計測用プロ−ブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6327034A (OSRAM) |
-
1986
- 1986-07-18 JP JP61170207A patent/JPS6327034A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6327034A (ja) | 1988-02-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1353366A3 (en) | Non-invasive electrical measurement of semiconductor wafers | |
| US9063036B2 (en) | Sample for electron microscopy and method of manufacturing the same | |
| CN104931741B (zh) | 微探针及其制备方法 | |
| KR20100006358A (ko) | 4 접점 전기전도도 측정을 위한 시편-전극 장착장치 | |
| JPH0516665B2 (OSRAM) | ||
| JPH01128535A (ja) | 半導体素子測定用プローブ | |
| JPS62109334A (ja) | ウエハプロ−ビング装置 | |
| JPS5523437A (en) | Manufacture of prove unit for semiconductor wafer test | |
| JPS6118338B2 (OSRAM) | ||
| JPH0290062A (ja) | プローブ・カード | |
| JPS6311725Y2 (OSRAM) | ||
| SU669430A1 (ru) | Зондова головка | |
| JPH0548131Y2 (OSRAM) | ||
| JPH01124534U (OSRAM) | ||
| JPH0412452Y2 (OSRAM) | ||
| JPS593582Y2 (ja) | 半導体ウエ−ハ試験用探針器 | |
| JPH0515068B2 (OSRAM) | ||
| JPS5918864B2 (ja) | 半導体ウエハ−検査装置 | |
| JPH0623965Y2 (ja) | プローブカード | |
| JPH0524061Y2 (OSRAM) | ||
| JPH0741151Y2 (ja) | マスクガラス等の温度測定機構 | |
| JPH0745021Y2 (ja) | プローブの接点構造 | |
| JPH0793347B2 (ja) | 半導体装置の検査装置 | |
| JPS6211179A (ja) | 半導体集積回路自動選別装置の接触素子 | |
| JPH03191543A (ja) | プローブ・カード |