JPS63250428A - インジウムの純化方法 - Google Patents
インジウムの純化方法Info
- Publication number
- JPS63250428A JPS63250428A JP8303887A JP8303887A JPS63250428A JP S63250428 A JPS63250428 A JP S63250428A JP 8303887 A JP8303887 A JP 8303887A JP 8303887 A JP8303887 A JP 8303887A JP S63250428 A JPS63250428 A JP S63250428A
- Authority
- JP
- Japan
- Prior art keywords
- indium
- temperature range
- heating
- region
- temp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 20
- 229910052738 indium Inorganic materials 0.000 title claims description 85
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 title claims description 83
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims abstract description 58
- 238000010438 heat treatment Methods 0.000 claims abstract description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 32
- 239000012535 impurity Substances 0.000 claims abstract description 20
- 239000004065 semiconductor Substances 0.000 claims abstract description 14
- 238000006722 reduction reaction Methods 0.000 claims abstract description 6
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- 239000002994 raw material Substances 0.000 claims abstract description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910003437 indium oxide Inorganic materials 0.000 claims description 50
- 238000000746 purification Methods 0.000 claims description 22
- 239000007789 gas Substances 0.000 claims description 17
- 239000011261 inert gas Substances 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 9
- 238000003860 storage Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 7
- 229910052717 sulfur Inorganic materials 0.000 abstract description 7
- BLBNEWYCYZMDEK-UHFFFAOYSA-N $l^{1}-indiganyloxyindium Chemical compound [In]O[In] BLBNEWYCYZMDEK-UHFFFAOYSA-N 0.000 abstract description 5
- 238000001704 evaporation Methods 0.000 abstract description 4
- 229910052751 metal Inorganic materials 0.000 description 31
- 239000002184 metal Substances 0.000 description 31
- 239000010453 quartz Substances 0.000 description 28
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 20
- 239000003708 ampul Substances 0.000 description 14
- 239000010409 thin film Substances 0.000 description 11
- 229910052786 argon Inorganic materials 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 150000002739 metals Chemical class 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000007667 floating Methods 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000000859 sublimation Methods 0.000 description 6
- 230000008022 sublimation Effects 0.000 description 6
- 239000011593 sulfur Substances 0.000 description 6
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 229910052723 transition metal Inorganic materials 0.000 description 3
- 150000003624 transition metals Chemical class 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000007670 refining Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 240000002329 Inga feuillei Species 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 150000002472 indium compounds Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Manufacture And Refinement Of Metals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8303887A JPS63250428A (ja) | 1987-04-06 | 1987-04-06 | インジウムの純化方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8303887A JPS63250428A (ja) | 1987-04-06 | 1987-04-06 | インジウムの純化方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63250428A true JPS63250428A (ja) | 1988-10-18 |
| JPH039173B2 JPH039173B2 (enrdf_load_stackoverflow) | 1991-02-07 |
Family
ID=13791042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8303887A Granted JPS63250428A (ja) | 1987-04-06 | 1987-04-06 | インジウムの純化方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63250428A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002241865A (ja) * | 2000-12-15 | 2002-08-28 | Nikko Materials Co Ltd | 金属インジウムの回収方法 |
| JP2002348619A (ja) * | 2001-05-22 | 2002-12-04 | Dowa Mining Co Ltd | ガリウムの取出し方法，保管，運搬方法及び収納容器 |
| KR100498871B1 (ko) * | 2001-12-06 | 2005-07-04 | (주)나인디지트 | 인듐 제조방법 |
| JP2013079443A (ja) * | 2011-09-20 | 2013-05-02 | Jx Nippon Mining & Metals Corp | インジウム又はインジウム合金の回収方法及び装置 |
| CN119038595A (zh) * | 2024-09-03 | 2024-11-29 | 昆明理工大学 | 一种真空法从氧化铟锡废靶中分离氧化铟和氧化锡的方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS579848A (en) * | 1980-05-26 | 1982-01-19 | Gnii Pi Redkometa | Production of high purity indium |
| JPS6136108A (ja) * | 1984-07-27 | 1986-02-20 | Showa Denko Kk | インジウムメタルの前処理方法およびその治具 |
-
1987
- 1987-04-06 JP JP8303887A patent/JPS63250428A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS579848A (en) * | 1980-05-26 | 1982-01-19 | Gnii Pi Redkometa | Production of high purity indium |
| JPS6136108A (ja) * | 1984-07-27 | 1986-02-20 | Showa Denko Kk | インジウムメタルの前処理方法およびその治具 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002241865A (ja) * | 2000-12-15 | 2002-08-28 | Nikko Materials Co Ltd | 金属インジウムの回収方法 |
| JP2002348619A (ja) * | 2001-05-22 | 2002-12-04 | Dowa Mining Co Ltd | ガリウムの取出し方法，保管，運搬方法及び収納容器 |
| KR100498871B1 (ko) * | 2001-12-06 | 2005-07-04 | (주)나인디지트 | 인듐 제조방법 |
| JP2013079443A (ja) * | 2011-09-20 | 2013-05-02 | Jx Nippon Mining & Metals Corp | インジウム又はインジウム合金の回収方法及び装置 |
| JP2015187305A (ja) * | 2011-09-20 | 2015-10-29 | Jx日鉱日石金属株式会社 | インジウム又はインジウム合金の回収方法及び装置 |
| CN119038595A (zh) * | 2024-09-03 | 2024-11-29 | 昆明理工大学 | 一种真空法从氧化铟锡废靶中分离氧化铟和氧化锡的方法 |
| CN119038595B (zh) * | 2024-09-03 | 2025-07-18 | 昆明理工大学 | 一种真空法从氧化铟锡废靶中分离氧化铟和氧化锡的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH039173B2 (enrdf_load_stackoverflow) | 1991-02-07 |
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