JPS6323705Y2 - - Google Patents

Info

Publication number
JPS6323705Y2
JPS6323705Y2 JP1984020849U JP2084984U JPS6323705Y2 JP S6323705 Y2 JPS6323705 Y2 JP S6323705Y2 JP 1984020849 U JP1984020849 U JP 1984020849U JP 2084984 U JP2084984 U JP 2084984U JP S6323705 Y2 JPS6323705 Y2 JP S6323705Y2
Authority
JP
Japan
Prior art keywords
hard mask
holder
receiving plate
manufacturing apparatus
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984020849U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60133455U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984020849U priority Critical patent/JPS60133455U/ja
Publication of JPS60133455U publication Critical patent/JPS60133455U/ja
Application granted granted Critical
Publication of JPS6323705Y2 publication Critical patent/JPS6323705Y2/ja
Granted legal-status Critical Current

Links

JP1984020849U 1984-02-16 1984-02-16 ハ−ドマスク製造装置 Granted JPS60133455U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984020849U JPS60133455U (ja) 1984-02-16 1984-02-16 ハ−ドマスク製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984020849U JPS60133455U (ja) 1984-02-16 1984-02-16 ハ−ドマスク製造装置

Publications (2)

Publication Number Publication Date
JPS60133455U JPS60133455U (ja) 1985-09-05
JPS6323705Y2 true JPS6323705Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-06-29

Family

ID=30511715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984020849U Granted JPS60133455U (ja) 1984-02-16 1984-02-16 ハ−ドマスク製造装置

Country Status (1)

Country Link
JP (1) JPS60133455U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS60133455U (ja) 1985-09-05

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