JPS6323616B2 - - Google Patents

Info

Publication number
JPS6323616B2
JPS6323616B2 JP59084261A JP8426184A JPS6323616B2 JP S6323616 B2 JPS6323616 B2 JP S6323616B2 JP 59084261 A JP59084261 A JP 59084261A JP 8426184 A JP8426184 A JP 8426184A JP S6323616 B2 JPS6323616 B2 JP S6323616B2
Authority
JP
Japan
Prior art keywords
wafer
vacuum processing
semiconductor
platen
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59084261A
Other languages
English (en)
Japanese (ja)
Other versions
JPS605540A (ja
Inventor
Ansonii Fuaretora Ronarudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of JPS605540A publication Critical patent/JPS605540A/ja
Publication of JPS6323616B2 publication Critical patent/JPS6323616B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/7606—
    • H10P72/7616—
    • H10P72/7618—
    • H10P72/7624—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S269/00—Work holders
    • Y10S269/903—Work holder for electrical circuit assemblages or wiring systems
JP59084261A 1979-03-16 1984-04-27 半導体ウエ−フアの真空処理装置 Granted JPS605540A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US21362 1979-03-16
US06/021,362 US4282924A (en) 1979-03-16 1979-03-16 Apparatus for mechanically clamping semiconductor wafer against pliable thermally conductive surface

Publications (2)

Publication Number Publication Date
JPS605540A JPS605540A (ja) 1985-01-12
JPS6323616B2 true JPS6323616B2 (cg-RX-API-DMAC10.html) 1988-05-17

Family

ID=21803766

Family Applications (2)

Application Number Title Priority Date Filing Date
JP3171680A Granted JPS55127034A (en) 1979-03-16 1980-03-14 Device for mechanically urging semiconductor wafer to soft thermoconductive surface
JP59084261A Granted JPS605540A (ja) 1979-03-16 1984-04-27 半導体ウエ−フアの真空処理装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP3171680A Granted JPS55127034A (en) 1979-03-16 1980-03-14 Device for mechanically urging semiconductor wafer to soft thermoconductive surface

Country Status (4)

Country Link
US (1) US4282924A (cg-RX-API-DMAC10.html)
EP (1) EP0016579B1 (cg-RX-API-DMAC10.html)
JP (2) JPS55127034A (cg-RX-API-DMAC10.html)
DE (1) DE3064514D1 (cg-RX-API-DMAC10.html)

Families Citing this family (85)

* Cited by examiner, † Cited by third party
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US4282924A (en) * 1979-03-16 1981-08-11 Varian Associates, Inc. Apparatus for mechanically clamping semiconductor wafer against pliable thermally conductive surface
EP0017472A1 (en) * 1979-04-06 1980-10-15 Lintott Engineering Limited Evacuable equipment containing a device for heat transfer and process for the manufacture of semi-conductor components using this equipment
US4743570A (en) * 1979-12-21 1988-05-10 Varian Associates, Inc. Method of thermal treatment of a wafer in an evacuated environment
US4909314A (en) * 1979-12-21 1990-03-20 Varian Associates, Inc. Apparatus for thermal treatment of a wafer in an evacuated environment
US4680061A (en) * 1979-12-21 1987-07-14 Varian Associates, Inc. Method of thermal treatment of a wafer in an evacuated environment
US4417347A (en) * 1981-05-12 1983-11-22 Varian Associates, Inc. Semiconductor processor incorporating blackbody radiation source with constant planar energy flux
US4433247A (en) * 1981-09-28 1984-02-21 Varian Associates, Inc. Beam sharing method and apparatus for ion implantation
GB2109996B (en) * 1981-11-24 1985-08-07 Varian Associates Hydraulically actuated semiconductor wafer clamping and cooling apparatus
DE3148354A1 (de) * 1981-12-07 1983-06-09 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur kathodenzerstaeubung eines metalles
US4512391A (en) * 1982-01-29 1985-04-23 Varian Associates, Inc. Apparatus for thermal treatment of semiconductor wafers by gas conduction incorporating peripheral gas inlet
JPS58169923A (ja) * 1982-03-31 1983-10-06 Toshiba Corp 電子ビ−ムを用いたｉｃテスタの試料固定治具
US4498833A (en) * 1982-05-24 1985-02-12 Varian Associates, Inc. Wafer orientation system
US4634331A (en) * 1982-05-24 1987-01-06 Varian Associates, Inc. Wafer transfer system
US4537244A (en) * 1982-05-25 1985-08-27 Varian Associates, Inc. Method for optimum conductive heat transfer with a thin flexible workpiece
US4535835A (en) * 1982-05-25 1985-08-20 Varian Associates, Inc. Optimum surface contour for conductive heat transfer with a thin flexible workpiece
JPH0670897B2 (ja) * 1982-05-25 1994-09-07 バリアン・アソシエイツ・インコ−ポレイテッド 薄く柔軟な物品から熱を除去する装置
US4458746A (en) * 1982-05-25 1984-07-10 Varian Associates, Inc. Optimum surface contour for conductive heat transfer with a thin flexible workpiece
US4457359A (en) * 1982-05-25 1984-07-03 Varian Associates, Inc. Apparatus for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer
DE3380505D1 (en) * 1982-05-25 1989-10-05 Varian Associates Optimum surface contour for conductive heat transfer with a thin flexible workpiece
US4508161A (en) * 1982-05-25 1985-04-02 Varian Associates, Inc. Method for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer
JPS5923732U (ja) * 1982-08-04 1984-02-14 日本真空技術株式会社 回転式イオン注入装置に於けるウエハ取付装置
US4542298A (en) * 1983-06-09 1985-09-17 Varian Associates, Inc. Methods and apparatus for gas-assisted thermal transfer with a semiconductor wafer
US5389793A (en) * 1983-08-15 1995-02-14 Applied Materials, Inc. Apparatus and methods for ion implantation
JPS60103829U (ja) * 1983-12-20 1985-07-15 日新電機株式会社 熱伝導性弾性シ−ト
US4603466A (en) * 1984-02-17 1986-08-05 Gca Corporation Wafer chuck
US4584045A (en) * 1984-02-21 1986-04-22 Plasma-Therm, Inc. Apparatus for conveying a semiconductor wafer
US4527620A (en) * 1984-05-02 1985-07-09 Varian Associates, Inc. Apparatus for controlling thermal transfer in a cyclic vacuum processing system
US4535834A (en) * 1984-05-02 1985-08-20 Varian Associates, Inc. Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system
US4567938A (en) * 1984-05-02 1986-02-04 Varian Associates, Inc. Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system
US4634512A (en) * 1984-08-21 1987-01-06 Komag, Inc. Disk and plug
US4733091A (en) * 1984-09-19 1988-03-22 Applied Materials, Inc. Systems and methods for ion implantation of semiconductor wafers
US4628991A (en) * 1984-11-26 1986-12-16 Trilogy Computer Development Partners, Ltd. Wafer scale integrated circuit testing chuck
US4717829A (en) * 1985-03-14 1988-01-05 Varian Associates, Inc. Platen and beam setup flag assembly for ion implanter
JPH07105345B2 (ja) * 1985-08-08 1995-11-13 日電アネルバ株式会社 基体処理装置
US4781244A (en) * 1986-02-25 1988-11-01 Nec Corporation Liquid cooling system for integrated circuit chips
US4700077A (en) * 1986-03-05 1987-10-13 Eaton Corporation Ion beam implanter control system
JPS62238653A (ja) * 1986-04-09 1987-10-19 Nec Corp 冷却構造
US4724325A (en) * 1986-04-23 1988-02-09 Eaton Corporation Adhesion cooling for an ion implantation system
US4671204A (en) * 1986-05-16 1987-06-09 Varian Associates, Inc. Low compliance seal for gas-enhanced wafer cooling in vacuum
US5044314A (en) * 1986-10-15 1991-09-03 Advantage Production Technology, Inc. Semiconductor wafer processing apparatus
US4778559A (en) * 1986-10-15 1988-10-18 Advantage Production Technology Semiconductor substrate heater and reactor process and apparatus
US4956046A (en) * 1986-10-15 1990-09-11 Advantage Production Technology, Inc. Semiconductor substrate treating method
US4891335A (en) * 1986-10-15 1990-01-02 Advantage Production Technology Inc. Semiconductor substrate heater and reactor process and apparatus
US4842683A (en) * 1986-12-19 1989-06-27 Applied Materials, Inc. Magnetic field-enhanced plasma etch reactor
US4817556A (en) * 1987-05-04 1989-04-04 Varian Associates, Inc. Apparatus for retaining wafers
US5040484A (en) * 1987-05-04 1991-08-20 Varian Associates, Inc. Apparatus for retaining wafers
US4942497A (en) * 1987-07-24 1990-07-17 Nec Corporation Cooling structure for heat generating electronic components mounted on a substrate
CA1283225C (en) * 1987-11-09 1991-04-16 Shinji Mine Cooling system for three-dimensional ic package
DE3853197T2 (de) * 1987-12-07 1995-06-29 Nippon Electric Co Kühlungssystem für integrierte Schaltungspackung.
US4938992A (en) * 1988-01-07 1990-07-03 Varian Associates, Inc. Methods for thermal transfer with a semiconductor
US4997606A (en) * 1988-01-07 1991-03-05 Varian Associates, Inc. Methods and apparatus for fabricating a high purity thermally-conductive polymer layer
US4832781A (en) * 1988-01-07 1989-05-23 Varian Associates, Inc. Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum
DE68918156T2 (de) * 1988-05-09 1995-01-12 Nippon Electric Co Flache Kühlungsstruktur für integrierte Schaltung.
US4949783A (en) * 1988-05-18 1990-08-21 Veeco Instruments, Inc. Substrate transport and cooling apparatus and method for same
US5262029A (en) * 1988-05-23 1993-11-16 Lam Research Method and system for clamping semiconductor wafers
US4975766A (en) * 1988-08-26 1990-12-04 Nec Corporation Structure for temperature detection in a package
JPH06100408B2 (ja) * 1988-09-09 1994-12-12 日本電気株式会社 冷却装置
EP0363687B1 (en) * 1988-09-20 1996-01-10 Nec Corporation Cooling structure for electronic components
EP0364619B1 (de) * 1988-10-19 1993-12-29 Ibm Deutschland Gmbh Vorrichtung zum Plasma- oder reaktiven Ionenätzen und Verfahren zum Ätzen schlecht wärmeleitender Substrate
US4944860A (en) * 1988-11-04 1990-07-31 Eaton Corporation Platen assembly for a vacuum processing system
US5042423A (en) * 1988-12-20 1991-08-27 Texas Instruments Incorporated Semiconductor wafer carrier design
DE3938267C2 (de) * 1989-11-17 1997-03-27 Leybold Ag Vorrichtung zum Heizen von Substraten
JPH03273663A (ja) * 1990-03-23 1991-12-04 Canon Inc 基板保持装置
KR940011708B1 (ko) * 1990-04-09 1994-12-23 니찌덴 아네루바 가부시끼가이샤 기판온도제어기구
GB9010833D0 (en) * 1990-05-15 1990-07-04 Electrotech Research Limited Workpiece support
US5452177A (en) * 1990-06-08 1995-09-19 Varian Associates, Inc. Electrostatic wafer clamp
USH1145H (en) 1990-09-25 1993-03-02 Sematech, Inc. Rapid temperature response wafer chuck
US5407548A (en) * 1990-10-26 1995-04-18 Leybold Aktiengesellschaft Method for coating a substrate of low resistance to corrosion
FR2671810A1 (fr) * 1991-01-18 1992-07-24 Alsthom Cge Alcatel Porte-substrat chauffant pour enceinte de depot de films sous vide.
USH1373H (en) * 1992-04-06 1994-11-01 American Telephone And Telegraph Company Wafer handling apparatus and method
AT405224B (de) * 1992-06-05 1999-06-25 Thallner Erich Vorrichtung zum ausrichten, zusammenführen und festhalten von scheibenförmigen bauteilen
US5509464A (en) * 1993-07-30 1996-04-23 Applied Materials, Inc. Method and apparatus for cooling rectangular substrates
US5486080A (en) * 1994-06-30 1996-01-23 Diamond Semiconductor Group, Inc. High speed movement of workpieces in vacuum processing
JPH08165571A (ja) * 1994-12-08 1996-06-25 Nissin Electric Co Ltd 基板保持装置およびその製造方法
US5908530A (en) * 1995-05-18 1999-06-01 Obsidian, Inc. Apparatus for chemical mechanical polishing
US6241005B1 (en) 1999-03-30 2001-06-05 Veeco Instruments, Inc. Thermal interface member
US6839217B1 (en) 1999-10-01 2005-01-04 Varian Semiconductor Equipment Associates, Inc. Surface structure and method of making, and electrostatic wafer clamp incorporating surface structure
US6176931B1 (en) 1999-10-29 2001-01-23 International Business Machines Corporation Wafer clamp ring for use in an ionized physical vapor deposition apparatus
JP4592916B2 (ja) * 2000-04-25 2010-12-08 東京エレクトロン株式会社 被処理体の載置装置
US6488565B1 (en) 2000-08-29 2002-12-03 Applied Materials, Inc. Apparatus for chemical mechanical planarization having nested load cups
US6686598B1 (en) 2000-09-01 2004-02-03 Varian Semiconductor Equipment Associates, Inc. Wafer clamping apparatus and method
US20040066601A1 (en) * 2002-10-04 2004-04-08 Varian Semiconductor Equipment Associates, Inc. Electrode configuration for retaining cooling gas on electrostatic wafer clamp
US6748293B1 (en) 2003-03-24 2004-06-08 Varian Semiconductor Equipment Associates, Inc. Methods and apparatus for high speed object handling
US7000418B2 (en) * 2004-05-14 2006-02-21 Intevac, Inc. Capacitance sensing for substrate cooling
US20060163490A1 (en) * 2005-01-21 2006-07-27 Advanced Ion Beam Technology Inc. Ion implantation cooling system

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3268770A (en) * 1964-04-02 1966-08-23 Int Rectifier Corp Water cooled semiconductor device assembly
CH558428A (de) * 1972-11-23 1975-01-31 Balzers Patent Beteilig Ag Target-wechselvorrichtung fuer die zerstaeubung mittels ionen.
US3853313A (en) * 1972-11-24 1974-12-10 Ibm Wafer interlocking transport system
JPS588106B2 (ja) * 1973-06-12 1983-02-14 バリアン アソシエイツ ホゴジヨウケンカデノ シヨリソウチ
GB1443215A (en) * 1973-11-07 1976-07-21 Mullard Ltd Electrostatically clamping a semiconductor wafer during device manufacture
JPS50109596A (cg-RX-API-DMAC10.html) * 1974-02-06 1975-08-28
US3920233A (en) * 1974-06-11 1975-11-18 Ibm Spherical support and translation device for wafers
DE2431507C3 (de) * 1974-07-01 1979-03-29 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum Handhaben eines dünnwandigen, eine gegen Berührung empfindliche Oberfläche aufweisenden Substrates
JPS5114277A (en) * 1974-07-25 1976-02-04 Matsushita Electric Industrial Co Ltd Kahenyoryodaioodono seizohoho
US4139051A (en) * 1976-09-07 1979-02-13 Rockwell International Corporation Method and apparatus for thermally stabilizing workpieces
JPS5355981A (en) * 1976-10-30 1978-05-20 Shinetsu Chemical Co Method of heat sinking for electric circuit
IL56224A (en) * 1978-01-16 1982-08-31 Veeco Instr Inc Substrate clamp for use in semiconductor fabrication
US4282924A (en) * 1979-03-16 1981-08-11 Varian Associates, Inc. Apparatus for mechanically clamping semiconductor wafer against pliable thermally conductive surface
JPS6031081U (ja) * 1983-08-09 1985-03-02 シャープ株式会社 フイルムセルと回路基板との間の接続構造

Also Published As

Publication number Publication date
DE3064514D1 (en) 1983-09-15
JPS6257066B2 (cg-RX-API-DMAC10.html) 1987-11-28
EP0016579B1 (en) 1983-08-10
EP0016579A1 (en) 1980-10-01
US4282924A (en) 1981-08-11
JPS605540A (ja) 1985-01-12
JPS55127034A (en) 1980-10-01

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