JPS5355981A - Method of heat sinking for electric circuit - Google Patents

Method of heat sinking for electric circuit

Info

Publication number
JPS5355981A
JPS5355981A JP13092176A JP13092176A JPS5355981A JP S5355981 A JPS5355981 A JP S5355981A JP 13092176 A JP13092176 A JP 13092176A JP 13092176 A JP13092176 A JP 13092176A JP S5355981 A JPS5355981 A JP S5355981A
Authority
JP
Japan
Prior art keywords
electric circuit
heat sinking
sinking
heat
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13092176A
Other languages
Japanese (ja)
Other versions
JPS5433959B2 (en
Inventor
Riyouichi Sado
Akio Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP13092176A priority Critical patent/JPS5355981A/en
Publication of JPS5355981A publication Critical patent/JPS5355981A/en
Publication of JPS5433959B2 publication Critical patent/JPS5433959B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Die Bonding (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP13092176A 1976-10-30 1976-10-30 Method of heat sinking for electric circuit Granted JPS5355981A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13092176A JPS5355981A (en) 1976-10-30 1976-10-30 Method of heat sinking for electric circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13092176A JPS5355981A (en) 1976-10-30 1976-10-30 Method of heat sinking for electric circuit

Publications (2)

Publication Number Publication Date
JPS5355981A true JPS5355981A (en) 1978-05-20
JPS5433959B2 JPS5433959B2 (en) 1979-10-24

Family

ID=15045841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13092176A Granted JPS5355981A (en) 1976-10-30 1976-10-30 Method of heat sinking for electric circuit

Country Status (1)

Country Link
JP (1) JPS5355981A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127034A (en) * 1979-03-16 1980-10-01 Varian Associates Device for mechanically urging semiconductor wafer to soft thermoconductive surface
JPS59205742A (en) * 1983-05-09 1984-11-21 Mitsubishi Electric Corp Semiconductor cooling device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4727348B2 (en) * 2005-08-23 2011-07-20 三菱重工業株式会社 Electric compressor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127034A (en) * 1979-03-16 1980-10-01 Varian Associates Device for mechanically urging semiconductor wafer to soft thermoconductive surface
JPS605540A (en) * 1979-03-16 1985-01-12 バリアン・アソシエイツ・インコ−ポレイテツド Vacuum treating device of semiconductor wafer
JPS6257066B2 (en) * 1979-03-16 1987-11-28 Varian Associates
JPS6323616B2 (en) * 1979-03-16 1988-05-17 Varian Associates
JPS59205742A (en) * 1983-05-09 1984-11-21 Mitsubishi Electric Corp Semiconductor cooling device
JPH0122986B2 (en) * 1983-05-09 1989-04-28 Mitsubishi Electric Corp

Also Published As

Publication number Publication date
JPS5433959B2 (en) 1979-10-24

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