JPS63206382A - 結晶引き上げ装置 - Google Patents

結晶引き上げ装置

Info

Publication number
JPS63206382A
JPS63206382A JP3850387A JP3850387A JPS63206382A JP S63206382 A JPS63206382 A JP S63206382A JP 3850387 A JP3850387 A JP 3850387A JP 3850387 A JP3850387 A JP 3850387A JP S63206382 A JPS63206382 A JP S63206382A
Authority
JP
Japan
Prior art keywords
wire
crystal pulling
ring
stainless steel
seed holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3850387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542396B2 (enrdf_load_stackoverflow
Inventor
Chihoko Kaneda
千穂子 金田
Tetsuo Fukuda
哲生 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3850387A priority Critical patent/JPS63206382A/ja
Publication of JPS63206382A publication Critical patent/JPS63206382A/ja
Publication of JPH0542396B2 publication Critical patent/JPH0542396B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP3850387A 1987-02-20 1987-02-20 結晶引き上げ装置 Granted JPS63206382A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3850387A JPS63206382A (ja) 1987-02-20 1987-02-20 結晶引き上げ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3850387A JPS63206382A (ja) 1987-02-20 1987-02-20 結晶引き上げ装置

Publications (2)

Publication Number Publication Date
JPS63206382A true JPS63206382A (ja) 1988-08-25
JPH0542396B2 JPH0542396B2 (enrdf_load_stackoverflow) 1993-06-28

Family

ID=12527074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3850387A Granted JPS63206382A (ja) 1987-02-20 1987-02-20 結晶引き上げ装置

Country Status (1)

Country Link
JP (1) JPS63206382A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09175894A (ja) * 1995-12-25 1997-07-08 Shin Etsu Handotai Co Ltd 単結晶引上げ装置
JPH11292686A (ja) * 1998-04-07 1999-10-26 Mitsubishi Materials Corp シードチャック
WO2000040786A1 (fr) * 1998-12-28 2000-07-13 Shin-Etsu Handotai Co., Ltd. Procede de production de monocristal et dispositif de tirage
JP2006169034A (ja) * 2004-12-15 2006-06-29 Shin Etsu Handotai Co Ltd 単結晶引上げ装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140106240A (ko) * 2013-02-26 2014-09-03 삼성에스디에스 주식회사 전원 모듈에 있어서 전압/전류의 효율 측정 시스템 및 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117547U (enrdf_load_stackoverflow) * 1976-03-02 1977-09-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117547U (enrdf_load_stackoverflow) * 1976-03-02 1977-09-06

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09175894A (ja) * 1995-12-25 1997-07-08 Shin Etsu Handotai Co Ltd 単結晶引上げ装置
EP0783047A1 (en) * 1995-12-25 1997-07-09 Shin-Etsu Handotai Company Limited Crystal Pulling Apparatus
US5833750A (en) * 1995-12-25 1998-11-10 Shin-Etsu Handotai Co. Ltd. Crystal pulling apparatus
JPH11292686A (ja) * 1998-04-07 1999-10-26 Mitsubishi Materials Corp シードチャック
WO2000040786A1 (fr) * 1998-12-28 2000-07-13 Shin-Etsu Handotai Co., Ltd. Procede de production de monocristal et dispositif de tirage
US6340391B1 (en) 1998-12-28 2002-01-22 Shin-Etsu Handotai Co. Method for producing single crystal and pulling device
JP3750525B2 (ja) * 1998-12-28 2006-03-01 信越半導体株式会社 単結晶の製造方法および引上げ装置
JP2006169034A (ja) * 2004-12-15 2006-06-29 Shin Etsu Handotai Co Ltd 単結晶引上げ装置

Also Published As

Publication number Publication date
JPH0542396B2 (enrdf_load_stackoverflow) 1993-06-28

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