JPS6318331B2 - - Google Patents
Info
- Publication number
- JPS6318331B2 JPS6318331B2 JP53112075A JP11207578A JPS6318331B2 JP S6318331 B2 JPS6318331 B2 JP S6318331B2 JP 53112075 A JP53112075 A JP 53112075A JP 11207578 A JP11207578 A JP 11207578A JP S6318331 B2 JPS6318331 B2 JP S6318331B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- diffusion layer
- film
- wiring
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11207578A JPS5538084A (en) | 1978-09-11 | 1978-09-11 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11207578A JPS5538084A (en) | 1978-09-11 | 1978-09-11 | Semiconductor integrated circuit device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5538084A JPS5538084A (en) | 1980-03-17 |
| JPS6318331B2 true JPS6318331B2 (enExample) | 1988-04-18 |
Family
ID=14577437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11207578A Granted JPS5538084A (en) | 1978-09-11 | 1978-09-11 | Semiconductor integrated circuit device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5538084A (enExample) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL173110C (nl) * | 1971-03-17 | 1983-12-01 | Philips Nv | Werkwijze ter vervaardiging van een halfgeleiderinrichting, waarbij op een oppervlak van een halfgeleiderlichaam een uit ten minste twee deellagen van verschillend materiaal samengestelde maskeringslaag wordt aangebracht. |
| JPS4990885A (enExample) * | 1972-12-28 | 1974-08-30 | ||
| GB1437112A (en) * | 1973-09-07 | 1976-05-26 | Mullard Ltd | Semiconductor device manufacture |
| JPS598065B2 (ja) * | 1976-01-30 | 1984-02-22 | 松下電子工業株式会社 | Mos集積回路の製造方法 |
-
1978
- 1978-09-11 JP JP11207578A patent/JPS5538084A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5538084A (en) | 1980-03-17 |
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