JPS63178549A - 極薄基板 - Google Patents

極薄基板

Info

Publication number
JPS63178549A
JPS63178549A JP62008914A JP891487A JPS63178549A JP S63178549 A JPS63178549 A JP S63178549A JP 62008914 A JP62008914 A JP 62008914A JP 891487 A JP891487 A JP 891487A JP S63178549 A JPS63178549 A JP S63178549A
Authority
JP
Japan
Prior art keywords
thin substrate
substrate
yttrium oxide
thin
extremely thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62008914A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0468779B2 (enrdf_load_stackoverflow
Inventor
Kazuharu Sasa
佐々　一治
Koichiro Taniguchi
光一郎 谷口
Noritatsu Sawada
沢田　昇龍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JGC Corp
Original Assignee
JGC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JGC Corp filed Critical JGC Corp
Priority to JP62008914A priority Critical patent/JPS63178549A/ja
Publication of JPS63178549A publication Critical patent/JPS63178549A/ja
Publication of JPH0468779B2 publication Critical patent/JPH0468779B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
JP62008914A 1987-01-20 1987-01-20 極薄基板 Granted JPS63178549A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62008914A JPS63178549A (ja) 1987-01-20 1987-01-20 極薄基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62008914A JPS63178549A (ja) 1987-01-20 1987-01-20 極薄基板

Publications (2)

Publication Number Publication Date
JPS63178549A true JPS63178549A (ja) 1988-07-22
JPH0468779B2 JPH0468779B2 (enrdf_load_stackoverflow) 1992-11-04

Family

ID=11705924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62008914A Granted JPS63178549A (ja) 1987-01-20 1987-01-20 極薄基板

Country Status (1)

Country Link
JP (1) JPS63178549A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5102483A (en) * 1989-02-27 1992-04-07 Jgc Corporation Method for production of elongated ceramic sheets
US6001761A (en) * 1994-09-27 1999-12-14 Nippon Shokubai Co., Ltd. Ceramics sheet and production method for same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5102483A (en) * 1989-02-27 1992-04-07 Jgc Corporation Method for production of elongated ceramic sheets
US6001761A (en) * 1994-09-27 1999-12-14 Nippon Shokubai Co., Ltd. Ceramics sheet and production method for same

Also Published As

Publication number Publication date
JPH0468779B2 (enrdf_load_stackoverflow) 1992-11-04

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