JPS63171345A - 表面欠陥検査装置 - Google Patents

表面欠陥検査装置

Info

Publication number
JPS63171345A
JPS63171345A JP365787A JP365787A JPS63171345A JP S63171345 A JPS63171345 A JP S63171345A JP 365787 A JP365787 A JP 365787A JP 365787 A JP365787 A JP 365787A JP S63171345 A JPS63171345 A JP S63171345A
Authority
JP
Japan
Prior art keywords
signal
level
inspected
image
dark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP365787A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587782B2 (enrdf_load_stackoverflow
Inventor
Masato Sakakibara
正人 榊原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP365787A priority Critical patent/JPS63171345A/ja
Publication of JPS63171345A publication Critical patent/JPS63171345A/ja
Publication of JPH0587782B2 publication Critical patent/JPH0587782B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP365787A 1987-01-09 1987-01-09 表面欠陥検査装置 Granted JPS63171345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP365787A JPS63171345A (ja) 1987-01-09 1987-01-09 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP365787A JPS63171345A (ja) 1987-01-09 1987-01-09 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS63171345A true JPS63171345A (ja) 1988-07-15
JPH0587782B2 JPH0587782B2 (enrdf_load_stackoverflow) 1993-12-17

Family

ID=11563537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP365787A Granted JPS63171345A (ja) 1987-01-09 1987-01-09 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS63171345A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002005844A (ja) * 2000-06-21 2002-01-09 Toyota Motor Corp 表面欠陥検査方法
JP2002116015A (ja) * 2000-10-05 2002-04-19 Mitsubishi Rayon Co Ltd 欠陥検出装置及び方法
JP2002148195A (ja) * 2000-11-06 2002-05-22 Sumitomo Chem Co Ltd 表面検査装置及び表面検査方法
JP2011033392A (ja) * 2009-07-30 2011-02-17 Kobe Steel Ltd 凹凸形状を抽出するための画像処理方法及び画像処理装置
JP2014190976A (ja) * 2013-03-28 2014-10-06 Dainippon Printing Co Ltd パターン検査システム、パターン検査方法
KR20150022359A (ko) * 2013-08-23 2015-03-04 와이즈플래닛(주) 표면 굴곡을 가진 디펙을 검사하는 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114113A (ja) * 1984-11-09 1986-05-31 Ishida Scales Mfg Co Ltd 重量判定方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114113A (ja) * 1984-11-09 1986-05-31 Ishida Scales Mfg Co Ltd 重量判定方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002005844A (ja) * 2000-06-21 2002-01-09 Toyota Motor Corp 表面欠陥検査方法
JP2002116015A (ja) * 2000-10-05 2002-04-19 Mitsubishi Rayon Co Ltd 欠陥検出装置及び方法
JP2002148195A (ja) * 2000-11-06 2002-05-22 Sumitomo Chem Co Ltd 表面検査装置及び表面検査方法
JP2011033392A (ja) * 2009-07-30 2011-02-17 Kobe Steel Ltd 凹凸形状を抽出するための画像処理方法及び画像処理装置
JP2014190976A (ja) * 2013-03-28 2014-10-06 Dainippon Printing Co Ltd パターン検査システム、パターン検査方法
KR20150022359A (ko) * 2013-08-23 2015-03-04 와이즈플래닛(주) 표면 굴곡을 가진 디펙을 검사하는 장치

Also Published As

Publication number Publication date
JPH0587782B2 (enrdf_load_stackoverflow) 1993-12-17

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