JPS63169743A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS63169743A
JPS63169743A JP127087A JP127087A JPS63169743A JP S63169743 A JPS63169743 A JP S63169743A JP 127087 A JP127087 A JP 127087A JP 127087 A JP127087 A JP 127087A JP S63169743 A JPS63169743 A JP S63169743A
Authority
JP
Japan
Prior art keywords
film
tungsten silicide
amorphous
oxide film
gate electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP127087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0571169B2 (enrdf_load_stackoverflow
Inventor
Michihide Ayukawa
鮎川　通英
Kenzo Matsuda
松田　謙三
Akitsu Shimoda
下田　あきつ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP127087A priority Critical patent/JPS63169743A/ja
Publication of JPS63169743A publication Critical patent/JPS63169743A/ja
Publication of JPH0571169B2 publication Critical patent/JPH0571169B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP127087A 1987-01-07 1987-01-07 半導体装置の製造方法 Granted JPS63169743A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP127087A JPS63169743A (ja) 1987-01-07 1987-01-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP127087A JPS63169743A (ja) 1987-01-07 1987-01-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS63169743A true JPS63169743A (ja) 1988-07-13
JPH0571169B2 JPH0571169B2 (enrdf_load_stackoverflow) 1993-10-06

Family

ID=11496762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP127087A Granted JPS63169743A (ja) 1987-01-07 1987-01-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS63169743A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5130266A (en) * 1990-08-28 1992-07-14 United Microelectronics Corporation Polycide gate MOSFET process for integrated circuits
US5618755A (en) * 1994-05-17 1997-04-08 Fuji Electric Co., Ltd. Method of manufacturing a polycide electrode

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58182873A (ja) * 1982-04-21 1983-10-25 Toshiba Corp 半導体装置の製造方法
JPS61174745A (ja) * 1985-01-30 1986-08-06 Fujitsu Ltd 半導体装置の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58182873A (ja) * 1982-04-21 1983-10-25 Toshiba Corp 半導体装置の製造方法
JPS61174745A (ja) * 1985-01-30 1986-08-06 Fujitsu Ltd 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5130266A (en) * 1990-08-28 1992-07-14 United Microelectronics Corporation Polycide gate MOSFET process for integrated circuits
US5618755A (en) * 1994-05-17 1997-04-08 Fuji Electric Co., Ltd. Method of manufacturing a polycide electrode

Also Published As

Publication number Publication date
JPH0571169B2 (enrdf_load_stackoverflow) 1993-10-06

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