JPS631679B2 - - Google Patents
Info
- Publication number
- JPS631679B2 JPS631679B2 JP51069795A JP6979576A JPS631679B2 JP S631679 B2 JPS631679 B2 JP S631679B2 JP 51069795 A JP51069795 A JP 51069795A JP 6979576 A JP6979576 A JP 6979576A JP S631679 B2 JPS631679 B2 JP S631679B2
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- reflectance
- metal thin
- thin film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 10
- 239000011521 glass Substances 0.000 description 7
- 239000011651 chromium Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- WTQZSMDDRMKJRI-UHFFFAOYSA-N 4-diazoniophenolate Chemical compound [O-]C1=CC=C([N+]#N)C=C1 WTQZSMDDRMKJRI-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6979576A JPS52154403A (en) | 1976-06-16 | 1976-06-16 | Photoosensitive recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6979576A JPS52154403A (en) | 1976-06-16 | 1976-06-16 | Photoosensitive recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52154403A JPS52154403A (en) | 1977-12-22 |
| JPS631679B2 true JPS631679B2 (cs) | 1988-01-13 |
Family
ID=13413022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6979576A Granted JPS52154403A (en) | 1976-06-16 | 1976-06-16 | Photoosensitive recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52154403A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0253175U (cs) * | 1988-10-12 | 1990-04-17 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI228718B (en) * | 2001-11-05 | 2005-03-01 | Tdk Corp | Manufacturing method and device of mold plate for information medium |
| WO2003077239A1 (fr) | 2002-03-11 | 2003-09-18 | Tdk Corporation | Procede de traitement conçu pour une matrice en resine photosensible, procede de production d'une matrice utilisant un support d'enregistrement, procede de production d'un support d'enregistrement, matrice en resine photosensible, matrice utilisant un support d'enregistrment et support d'enregistrement |
-
1976
- 1976-06-16 JP JP6979576A patent/JPS52154403A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0253175U (cs) * | 1988-10-12 | 1990-04-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52154403A (en) | 1977-12-22 |
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