JPS6316687B2 - - Google Patents
Info
- Publication number
- JPS6316687B2 JPS6316687B2 JP20828882A JP20828882A JPS6316687B2 JP S6316687 B2 JPS6316687 B2 JP S6316687B2 JP 20828882 A JP20828882 A JP 20828882A JP 20828882 A JP20828882 A JP 20828882A JP S6316687 B2 JPS6316687 B2 JP S6316687B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- image
- height
- bright
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 18
- 238000003384 imaging method Methods 0.000 claims description 9
- 238000012935 Averaging Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 23
- 238000005259 measurement Methods 0.000 description 14
- 238000010894 electron beam technology Methods 0.000 description 11
- 238000001514 detection method Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20828882A JPS5999216A (ja) | 1982-11-27 | 1982-11-27 | 物体の表面高さ測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20828882A JPS5999216A (ja) | 1982-11-27 | 1982-11-27 | 物体の表面高さ測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5999216A JPS5999216A (ja) | 1984-06-07 |
| JPS6316687B2 true JPS6316687B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-04-11 |
Family
ID=16553762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20828882A Granted JPS5999216A (ja) | 1982-11-27 | 1982-11-27 | 物体の表面高さ測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5999216A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0820230B2 (ja) * | 1984-06-08 | 1996-03-04 | オリンパス光学工業株式会社 | 計測用内視鏡 |
| JPS6174338A (ja) * | 1984-09-20 | 1986-04-16 | Hitachi Ltd | 縮小投影露光装置およびその方法 |
| JP2728368B2 (ja) * | 1994-09-05 | 1998-03-18 | 株式会社 日立製作所 | 露光方法 |
-
1982
- 1982-11-27 JP JP20828882A patent/JPS5999216A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5999216A (ja) | 1984-06-07 |