JPH0317282B2 - - Google Patents
Info
- Publication number
- JPH0317282B2 JPH0317282B2 JP25678584A JP25678584A JPH0317282B2 JP H0317282 B2 JPH0317282 B2 JP H0317282B2 JP 25678584 A JP25678584 A JP 25678584A JP 25678584 A JP25678584 A JP 25678584A JP H0317282 B2 JPH0317282 B2 JP H0317282B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- image
- height
- optical system
- light irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 description 26
- 238000005259 measurement Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25678584A JPS61134605A (ja) | 1984-12-05 | 1984-12-05 | 物体の表面高さ測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25678584A JPS61134605A (ja) | 1984-12-05 | 1984-12-05 | 物体の表面高さ測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61134605A JPS61134605A (ja) | 1986-06-21 |
| JPH0317282B2 true JPH0317282B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-03-07 |
Family
ID=17297411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25678584A Granted JPS61134605A (ja) | 1984-12-05 | 1984-12-05 | 物体の表面高さ測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61134605A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2764399B2 (ja) * | 1987-09-22 | 1998-06-11 | 東芝メカトロニクス株式会社 | 絵柄面積率測定装置 |
| JP2578519B2 (ja) * | 1990-06-01 | 1997-02-05 | 株式会社日立製作所 | 光線による位置検出機能付き荷電粒子線露光装置 |
-
1984
- 1984-12-05 JP JP25678584A patent/JPS61134605A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61134605A (ja) | 1986-06-21 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |