JPS6253049B2 - - Google Patents
Info
- Publication number
- JPS6253049B2 JPS6253049B2 JP20828782A JP20828782A JPS6253049B2 JP S6253049 B2 JPS6253049 B2 JP S6253049B2 JP 20828782 A JP20828782 A JP 20828782A JP 20828782 A JP20828782 A JP 20828782A JP S6253049 B2 JPS6253049 B2 JP S6253049B2
- Authority
- JP
- Japan
- Prior art keywords
- bright
- light
- image
- dark images
- dark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 25
- 230000003287 optical effect Effects 0.000 claims description 17
- 238000003384 imaging method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 description 17
- 238000001514 detection method Methods 0.000 description 12
- 238000010894 electron beam technology Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000010354 integration Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20828782A JPS5999215A (ja) | 1982-11-27 | 1982-11-27 | 物体の表面高さ測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20828782A JPS5999215A (ja) | 1982-11-27 | 1982-11-27 | 物体の表面高さ測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5999215A JPS5999215A (ja) | 1984-06-07 |
| JPS6253049B2 true JPS6253049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-09 |
Family
ID=16553745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20828782A Granted JPS5999215A (ja) | 1982-11-27 | 1982-11-27 | 物体の表面高さ測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5999215A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6174338A (ja) * | 1984-09-20 | 1986-04-16 | Hitachi Ltd | 縮小投影露光装置およびその方法 |
| JPH0756444B2 (ja) * | 1985-09-19 | 1995-06-14 | 株式会社トプコン | 位置検出装置 |
-
1982
- 1982-11-27 JP JP20828782A patent/JPS5999215A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5999215A (ja) | 1984-06-07 |