JPS5999215A - 物体の表面高さ測定装置 - Google Patents

物体の表面高さ測定装置

Info

Publication number
JPS5999215A
JPS5999215A JP20828782A JP20828782A JPS5999215A JP S5999215 A JPS5999215 A JP S5999215A JP 20828782 A JP20828782 A JP 20828782A JP 20828782 A JP20828782 A JP 20828782A JP S5999215 A JPS5999215 A JP S5999215A
Authority
JP
Japan
Prior art keywords
light
bright
image
dark images
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20828782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6253049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Toyoki Kitayama
北山　豊樹
Shigeru Moriya
茂 守屋
Kazuhiko Komatsu
一彦 小松
Teruaki Okino
輝昭 沖野
Shunichi Ide
俊一 井手
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP20828782A priority Critical patent/JPS5999215A/ja
Publication of JPS5999215A publication Critical patent/JPS5999215A/ja
Publication of JPS6253049B2 publication Critical patent/JPS6253049B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP20828782A 1982-11-27 1982-11-27 物体の表面高さ測定装置 Granted JPS5999215A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20828782A JPS5999215A (ja) 1982-11-27 1982-11-27 物体の表面高さ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20828782A JPS5999215A (ja) 1982-11-27 1982-11-27 物体の表面高さ測定装置

Publications (2)

Publication Number Publication Date
JPS5999215A true JPS5999215A (ja) 1984-06-07
JPS6253049B2 JPS6253049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-09

Family

ID=16553745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20828782A Granted JPS5999215A (ja) 1982-11-27 1982-11-27 物体の表面高さ測定装置

Country Status (1)

Country Link
JP (1) JPS5999215A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174338A (ja) * 1984-09-20 1986-04-16 Hitachi Ltd 縮小投影露光装置およびその方法
JPS6266112A (ja) * 1985-09-19 1987-03-25 Tokyo Optical Co Ltd 位置検出装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174338A (ja) * 1984-09-20 1986-04-16 Hitachi Ltd 縮小投影露光装置およびその方法
JPS6266112A (ja) * 1985-09-19 1987-03-25 Tokyo Optical Co Ltd 位置検出装置

Also Published As

Publication number Publication date
JPS6253049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-09

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