JPS6316654A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS6316654A JPS6316654A JP16112386A JP16112386A JPS6316654A JP S6316654 A JPS6316654 A JP S6316654A JP 16112386 A JP16112386 A JP 16112386A JP 16112386 A JP16112386 A JP 16112386A JP S6316654 A JPS6316654 A JP S6316654A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- substrate
- semiconductor device
- semiconductor substrate
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 10
- 238000009825 accumulation Methods 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 8
- 239000012535 impurity Substances 0.000 abstract description 6
- 230000010354 integration Effects 0.000 abstract description 3
- 238000009792 diffusion process Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16112386A JPS6316654A (ja) | 1986-07-08 | 1986-07-08 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16112386A JPS6316654A (ja) | 1986-07-08 | 1986-07-08 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6316654A true JPS6316654A (ja) | 1988-01-23 |
| JPH0546988B2 JPH0546988B2 (https=) | 1993-07-15 |
Family
ID=15729039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16112386A Granted JPS6316654A (ja) | 1986-07-08 | 1986-07-08 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6316654A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0287662A (ja) * | 1988-09-26 | 1990-03-28 | Nec Ic Microcomput Syst Ltd | 半導体装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5348072A (en) * | 1976-10-14 | 1978-05-01 | Tokyo Shibaura Electric Co | Press working method |
-
1986
- 1986-07-08 JP JP16112386A patent/JPS6316654A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5348072A (en) * | 1976-10-14 | 1978-05-01 | Tokyo Shibaura Electric Co | Press working method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0287662A (ja) * | 1988-09-26 | 1990-03-28 | Nec Ic Microcomput Syst Ltd | 半導体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546988B2 (https=) | 1993-07-15 |
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