JPS63162857A - 真空蒸着装置 - Google Patents
真空蒸着装置Info
- Publication number
- JPS63162857A JPS63162857A JP31039386A JP31039386A JPS63162857A JP S63162857 A JPS63162857 A JP S63162857A JP 31039386 A JP31039386 A JP 31039386A JP 31039386 A JP31039386 A JP 31039386A JP S63162857 A JPS63162857 A JP S63162857A
- Authority
- JP
- Japan
- Prior art keywords
- disk
- turntable
- holder
- disc
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract description 5
- 238000007738 vacuum evaporation Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 238000003795 desorption Methods 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 abstract description 18
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31039386A JPS63162857A (ja) | 1986-12-25 | 1986-12-25 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31039386A JPS63162857A (ja) | 1986-12-25 | 1986-12-25 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63162857A true JPS63162857A (ja) | 1988-07-06 |
| JPH032949B2 JPH032949B2 (enrdf_load_stackoverflow) | 1991-01-17 |
Family
ID=18004719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31039386A Granted JPS63162857A (ja) | 1986-12-25 | 1986-12-25 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63162857A (enrdf_load_stackoverflow) |
-
1986
- 1986-12-25 JP JP31039386A patent/JPS63162857A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH032949B2 (enrdf_load_stackoverflow) | 1991-01-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |