JPH0311228Y2 - - Google Patents
Info
- Publication number
- JPH0311228Y2 JPH0311228Y2 JP20203186U JP20203186U JPH0311228Y2 JP H0311228 Y2 JPH0311228 Y2 JP H0311228Y2 JP 20203186 U JP20203186 U JP 20203186U JP 20203186 U JP20203186 U JP 20203186U JP H0311228 Y2 JPH0311228 Y2 JP H0311228Y2
- Authority
- JP
- Japan
- Prior art keywords
- heating
- electrodes
- vacuum chamber
- electrode
- vacuum evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 49
- 238000007738 vacuum evaporation Methods 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20203186U JPH0311228Y2 (enrdf_load_stackoverflow) | 1986-12-25 | 1986-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20203186U JPH0311228Y2 (enrdf_load_stackoverflow) | 1986-12-25 | 1986-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63106760U JPS63106760U (enrdf_load_stackoverflow) | 1988-07-09 |
| JPH0311228Y2 true JPH0311228Y2 (enrdf_load_stackoverflow) | 1991-03-19 |
Family
ID=31166040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20203186U Expired JPH0311228Y2 (enrdf_load_stackoverflow) | 1986-12-25 | 1986-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311228Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007035166B4 (de) * | 2007-07-27 | 2010-07-29 | Createc Fischer & Co. Gmbh | Hochtemperatur-Verdampferzelle mit parallel geschalteten Heizbereichen, Verfahren zu deren Betrieb und deren Verwendung in Beschichtungsanlagen |
-
1986
- 1986-12-25 JP JP20203186U patent/JPH0311228Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63106760U (enrdf_load_stackoverflow) | 1988-07-09 |
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