JPS63106760U - - Google Patents

Info

Publication number
JPS63106760U
JPS63106760U JP20203186U JP20203186U JPS63106760U JP S63106760 U JPS63106760 U JP S63106760U JP 20203186 U JP20203186 U JP 20203186U JP 20203186 U JP20203186 U JP 20203186U JP S63106760 U JPS63106760 U JP S63106760U
Authority
JP
Japan
Prior art keywords
electrodes
heating
vacuum evaporation
spacing
evaporation apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20203186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311228Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20203186U priority Critical patent/JPH0311228Y2/ja
Publication of JPS63106760U publication Critical patent/JPS63106760U/ja
Application granted granted Critical
Publication of JPH0311228Y2 publication Critical patent/JPH0311228Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP20203186U 1986-12-25 1986-12-25 Expired JPH0311228Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20203186U JPH0311228Y2 (enrdf_load_stackoverflow) 1986-12-25 1986-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20203186U JPH0311228Y2 (enrdf_load_stackoverflow) 1986-12-25 1986-12-25

Publications (2)

Publication Number Publication Date
JPS63106760U true JPS63106760U (enrdf_load_stackoverflow) 1988-07-09
JPH0311228Y2 JPH0311228Y2 (enrdf_load_stackoverflow) 1991-03-19

Family

ID=31166040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20203186U Expired JPH0311228Y2 (enrdf_load_stackoverflow) 1986-12-25 1986-12-25

Country Status (1)

Country Link
JP (1) JPH0311228Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010534770A (ja) * 2007-07-27 2010-11-11 クレア テック フィッシャー・ウント・コー・ゲーエムベーハー 並列接続された加熱ゾーンを有する高温蒸発器セル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010534770A (ja) * 2007-07-27 2010-11-11 クレア テック フィッシャー・ウント・コー・ゲーエムベーハー 並列接続された加熱ゾーンを有する高温蒸発器セル

Also Published As

Publication number Publication date
JPH0311228Y2 (enrdf_load_stackoverflow) 1991-03-19

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