JPS63106760U - - Google Patents
Info
- Publication number
- JPS63106760U JPS63106760U JP20203186U JP20203186U JPS63106760U JP S63106760 U JPS63106760 U JP S63106760U JP 20203186 U JP20203186 U JP 20203186U JP 20203186 U JP20203186 U JP 20203186U JP S63106760 U JPS63106760 U JP S63106760U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- heating
- vacuum evaporation
- spacing
- evaporation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000007738 vacuum evaporation Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案による真空蒸着装置の加熱装置
の一実施例を示す側面図、第２図は従来の真空蒸
着装置の加熱装置の構成を示す側面図、第３図は
従来の真空蒸着装置の構成を示す平面図、第４図
は第３図の真空蒸着装置の左半分を示す縦断面図
である。
Ｄ……デイスク、１……架台、２ａ，２ｂ……
レール、３ａ，３ｂ……ターンテーブル、４……
真空槽、５ａ，５ｂ……デイスク脱着装置、６…
…デイスクホルダー、７……支軸、８……台車、
９……軸受、１０……ガイドローラ、１１……ギ
ヤ、１２……モータ、１３……駆動ギヤ、１４…
…自転ギヤ、１５……ホルダー駆動ギヤ、１６…
…継手、２１ａ，２１ｂ……電極、２２……発熱
線、２３……電源、３１ａ，３１ｂ……電極、Ｎ
１〜Ｎ５……発熱線。
FIG. 1 is a side view showing an embodiment of the heating device of a vacuum evaporation device according to the present invention, FIG. 2 is a side view showing the configuration of a heating device of a conventional vacuum evaporation device, and FIG. 3 is a side view of a conventional vacuum evaporation device. FIG. 4 is a vertical sectional view showing the left half of the vacuum evaporation apparatus shown in FIG. 3. D... Disk, 1... Frame, 2a, 2b...
Rail, 3a, 3b... Turntable, 4...
Vacuum chamber, 5a, 5b... Disk attachment/detachment device, 6...
...Disc holder, 7...Spindle, 8...Dolly,
9... Bearing, 10... Guide roller, 11... Gear, 12... Motor, 13... Drive gear, 14...
...Rotation gear, 15...Holder drive gear, 16...
...Joint, 21a, 21b...Electrode, 22...Heating wire, 23...Power source, 31a, 31b...Electrode, N
1 to N5 ...Heating wire.
Claims (1)
配設し、これら２本の電極間に複数本の蒸着金属
加熱用の発熱線を並列に接続して成る真空蒸着装
置の加熱装置において、 ２本の電極間に接続される複数本の発熱線の長
さを、電極上部に接続される発熱線ほどその長さ
を短く設定すると共に、それに合わせて２つの電
極の上端部間の間隔が下端部間の間隔より狭くな
るように配置したことを特徴とする真空蒸着装置
の加熱装置。[Claim for Utility Model Registration] Two electrodes are arranged vertically at a predetermined interval in a vacuum chamber, and a plurality of heating wires for heating evaporated metal are connected in parallel between these two electrodes. In a heating device for a vacuum evaporation apparatus, the length of the plurality of heating wires connected between two electrodes is set to be shorter as the heating wire is connected to the upper part of the electrode, and A heating device for a vacuum evaporation apparatus, characterized in that the spacing between the upper ends of two electrodes is narrower than the spacing between the lower ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20203186U JPH0311228Y2 (en) | 1986-12-25 | 1986-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20203186U JPH0311228Y2 (en) | 1986-12-25 | 1986-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63106760U true JPS63106760U (en) | 1988-07-09 |
| JPH0311228Y2 JPH0311228Y2 (en) | 1991-03-19 |
Family
ID=31166040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20203186U Expired JPH0311228Y2 (en) | 1986-12-25 | 1986-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311228Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010534770A (en) * | 2007-07-27 | 2010-11-11 | クレア テック フィッシャー・ウント・コー・ゲーエムベーハー | High temperature evaporator cell with heating zones connected in parallel |
-
1986
- 1986-12-25 JP JP20203186U patent/JPH0311228Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010534770A (en) * | 2007-07-27 | 2010-11-11 | クレア テック フィッシャー・ウント・コー・ゲーエムベーハー | High temperature evaporator cell with heating zones connected in parallel |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311228Y2 (en) | 1991-03-19 |
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