JPS6315992B2 - - Google Patents
Info
- Publication number
- JPS6315992B2 JPS6315992B2 JP16053282A JP16053282A JPS6315992B2 JP S6315992 B2 JPS6315992 B2 JP S6315992B2 JP 16053282 A JP16053282 A JP 16053282A JP 16053282 A JP16053282 A JP 16053282A JP S6315992 B2 JPS6315992 B2 JP S6315992B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- mask
- metal material
- etched
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 62
- 238000000034 method Methods 0.000 claims description 21
- 239000007769 metal material Substances 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 description 28
- 239000002184 metal Substances 0.000 description 28
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 16
- 229910052782 aluminium Inorganic materials 0.000 description 15
- 150000002739 metals Chemical class 0.000 description 8
- 239000002131 composite material Substances 0.000 description 5
- 239000010953 base metal Substances 0.000 description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 3
- 238000005253 cladding Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000003908 quality control method Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16053282A JPS5950181A (ja) | 1982-09-14 | 1982-09-14 | 部分エッチング法とそれに使用される機械的マスク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16053282A JPS5950181A (ja) | 1982-09-14 | 1982-09-14 | 部分エッチング法とそれに使用される機械的マスク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5950181A JPS5950181A (ja) | 1984-03-23 |
| JPS6315992B2 true JPS6315992B2 (ko) | 1988-04-07 |
Family
ID=15717000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16053282A Granted JPS5950181A (ja) | 1982-09-14 | 1982-09-14 | 部分エッチング法とそれに使用される機械的マスク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5950181A (ko) |
-
1982
- 1982-09-14 JP JP16053282A patent/JPS5950181A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5950181A (ja) | 1984-03-23 |
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