JPS63158853A - 多層配線形成法 - Google Patents

多層配線形成法

Info

Publication number
JPS63158853A
JPS63158853A JP62311980A JP31198087A JPS63158853A JP S63158853 A JPS63158853 A JP S63158853A JP 62311980 A JP62311980 A JP 62311980A JP 31198087 A JP31198087 A JP 31198087A JP S63158853 A JPS63158853 A JP S63158853A
Authority
JP
Japan
Prior art keywords
wiring
film
sog
glass layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62311980A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0121626B2 (enExample
Inventor
Takahiko Takahashi
高橋　貴彦
Akio Anzai
安斎　昭夫
Kensuke Nakada
健介 中田
Chiyoshi Kamata
千代士 鎌田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP62311980A priority Critical patent/JPS63158853A/ja
Publication of JPS63158853A publication Critical patent/JPS63158853A/ja
Publication of JPH0121626B2 publication Critical patent/JPH0121626B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Local Oxidation Of Silicon (AREA)
JP62311980A 1987-12-11 1987-12-11 多層配線形成法 Granted JPS63158853A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62311980A JPS63158853A (ja) 1987-12-11 1987-12-11 多層配線形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62311980A JPS63158853A (ja) 1987-12-11 1987-12-11 多層配線形成法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10912379A Division JPS5633899A (en) 1979-08-29 1979-08-29 Method of forming multilayer wire

Publications (2)

Publication Number Publication Date
JPS63158853A true JPS63158853A (ja) 1988-07-01
JPH0121626B2 JPH0121626B2 (enExample) 1989-04-21

Family

ID=18023753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62311980A Granted JPS63158853A (ja) 1987-12-11 1987-12-11 多層配線形成法

Country Status (1)

Country Link
JP (1) JPS63158853A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6313044B1 (en) 1998-10-29 2001-11-06 Hyundai Electronics Industries Co., Ltd. Methods for forming a spin-on-glass layer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5133575A (en) * 1974-09-17 1976-03-22 Nippon Telegraph & Telephone Tasohaisenkozo
JPS5214365A (en) * 1975-07-25 1977-02-03 Hitachi Ltd Process for formation of insulating membrane by spreading

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5133575A (en) * 1974-09-17 1976-03-22 Nippon Telegraph & Telephone Tasohaisenkozo
JPS5214365A (en) * 1975-07-25 1977-02-03 Hitachi Ltd Process for formation of insulating membrane by spreading

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6313044B1 (en) 1998-10-29 2001-11-06 Hyundai Electronics Industries Co., Ltd. Methods for forming a spin-on-glass layer

Also Published As

Publication number Publication date
JPH0121626B2 (enExample) 1989-04-21

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