JPS6315741B2 - - Google Patents
Info
- Publication number
- JPS6315741B2 JPS6315741B2 JP17612486A JP17612486A JPS6315741B2 JP S6315741 B2 JPS6315741 B2 JP S6315741B2 JP 17612486 A JP17612486 A JP 17612486A JP 17612486 A JP17612486 A JP 17612486A JP S6315741 B2 JPS6315741 B2 JP S6315741B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- wafer
- semiconductor substrate
- gas
- oxidation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 11
- 238000001947 vapour-phase growth Methods 0.000 claims description 10
- 229910021478 group 5 element Inorganic materials 0.000 claims 1
- 230000003647 oxidation Effects 0.000 description 22
- 238000007254 oxidation reaction Methods 0.000 description 22
- 235000012431 wafers Nutrition 0.000 description 21
- 239000010453 quartz Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612486A JPS62229845A (ja) | 1979-06-29 | 1986-07-26 | 気相成長方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8320979A JPS567436A (en) | 1979-06-29 | 1979-06-29 | High pressure treating device |
| JP17612486A JPS62229845A (ja) | 1979-06-29 | 1986-07-26 | 気相成長方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8320979A Division JPS567436A (en) | 1979-06-29 | 1979-06-29 | High pressure treating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62229845A JPS62229845A (ja) | 1987-10-08 |
| JPS6315741B2 true JPS6315741B2 (ko) | 1988-04-06 |
Family
ID=26424271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17612486A Granted JPS62229845A (ja) | 1979-06-29 | 1986-07-26 | 気相成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62229845A (ko) |
-
1986
- 1986-07-26 JP JP17612486A patent/JPS62229845A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62229845A (ja) | 1987-10-08 |
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