JPS567436A - High pressure treating device - Google Patents
High pressure treating deviceInfo
- Publication number
- JPS567436A JPS567436A JP8320979A JP8320979A JPS567436A JP S567436 A JPS567436 A JP S567436A JP 8320979 A JP8320979 A JP 8320979A JP 8320979 A JP8320979 A JP 8320979A JP S567436 A JPS567436 A JP S567436A
- Authority
- JP
- Japan
- Prior art keywords
- vessel
- wafer
- pressure
- high pressure
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
PURPOSE:To eliminate the need for taking notice of a heat resisting property of a pressure resisting vessel and simplify the structure of a furnace by a method wherein only a body to be treated in the pressure resisting vessel is heated. CONSTITUTION:A device is formed in such a manner that a semiconductor wafer 22 to be treated is housed in a high pressure vessel 21, on whose upper surface a transparent peep window 20 is attached, and laser beams 30 are irradiated only to the wafer 22 from the outside through the peep window 20. The area of the window 20 may be comparatively small fitting one. Such constitution results in a high temperature only near the surface of the wafer 22 because only the wafer 22 can be heated by the laser beams 30. Thus, the structure of a furnace is extremely simplified because the vessel 1 may resist only to pressure and can be designed without having no regard for the effect of heat.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8320979A JPS567436A (en) | 1979-06-29 | 1979-06-29 | High pressure treating device |
JP17612486A JPS62229845A (en) | 1979-06-29 | 1986-07-26 | Vapor growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8320979A JPS567436A (en) | 1979-06-29 | 1979-06-29 | High pressure treating device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17612486A Division JPS62229845A (en) | 1979-06-29 | 1986-07-26 | Vapor growth method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS567436A true JPS567436A (en) | 1981-01-26 |
Family
ID=13795924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8320979A Pending JPS567436A (en) | 1979-06-29 | 1979-06-29 | High pressure treating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS567436A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59131150U (en) * | 1983-02-22 | 1984-09-03 | 三洋電機株式会社 | Compound semiconductor heat treatment equipment |
JPS61161711A (en) * | 1985-01-11 | 1986-07-22 | Denkoo:Kk | Thermal treatment method of semiconductor and thermal treatment equipment |
JPS6212947U (en) * | 1985-07-08 | 1987-01-26 | ||
JPH027421A (en) * | 1987-10-15 | 1990-01-11 | Solems Sa | Apparatus for manufacture of thin film by plasma deposition especially for electronic and/or optoelectronic technology device and its driving method |
JP2002246327A (en) * | 2001-02-21 | 2002-08-30 | Semiconductor Energy Lab Co Ltd | Heat treatment device and manufacturing method for semiconductor device |
US6588232B1 (en) | 1998-01-13 | 2003-07-08 | Kabushiki Kaisha Toshiba | Treatment device, laser annealing device, manufacturing apparatus, and manufacturing apparatus for flat display device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023570A (en) * | 1973-06-29 | 1975-03-13 | ||
JPS5372572A (en) * | 1976-12-10 | 1978-06-28 | Mitsubishi Electric Corp | Manufacturing device for semiconductor device |
-
1979
- 1979-06-29 JP JP8320979A patent/JPS567436A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023570A (en) * | 1973-06-29 | 1975-03-13 | ||
JPS5372572A (en) * | 1976-12-10 | 1978-06-28 | Mitsubishi Electric Corp | Manufacturing device for semiconductor device |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59131150U (en) * | 1983-02-22 | 1984-09-03 | 三洋電機株式会社 | Compound semiconductor heat treatment equipment |
JPS61161711A (en) * | 1985-01-11 | 1986-07-22 | Denkoo:Kk | Thermal treatment method of semiconductor and thermal treatment equipment |
JPS6212947U (en) * | 1985-07-08 | 1987-01-26 | ||
JPH0510354Y2 (en) * | 1985-07-08 | 1993-03-15 | ||
JPH027421A (en) * | 1987-10-15 | 1990-01-11 | Solems Sa | Apparatus for manufacture of thin film by plasma deposition especially for electronic and/or optoelectronic technology device and its driving method |
US6588232B1 (en) | 1998-01-13 | 2003-07-08 | Kabushiki Kaisha Toshiba | Treatment device, laser annealing device, manufacturing apparatus, and manufacturing apparatus for flat display device |
JP2002246327A (en) * | 2001-02-21 | 2002-08-30 | Semiconductor Energy Lab Co Ltd | Heat treatment device and manufacturing method for semiconductor device |
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