JPS5352354A - Semiconductor local heating method - Google Patents
Semiconductor local heating methodInfo
- Publication number
- JPS5352354A JPS5352354A JP12722676A JP12722676A JPS5352354A JP S5352354 A JPS5352354 A JP S5352354A JP 12722676 A JP12722676 A JP 12722676A JP 12722676 A JP12722676 A JP 12722676A JP S5352354 A JPS5352354 A JP S5352354A
- Authority
- JP
- Japan
- Prior art keywords
- heating method
- local heating
- semiconductor local
- semiconductor
- impractical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Recrystallisation Techniques (AREA)
Abstract
PURPOSE: The modes of heat treatment are made various and such a treatment method which had been impractical with conventional heat treatments is made possible by using a laser beam in locally heating a semiconductor wafer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12722676A JPS5352354A (en) | 1976-10-25 | 1976-10-25 | Semiconductor local heating method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12722676A JPS5352354A (en) | 1976-10-25 | 1976-10-25 | Semiconductor local heating method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5352354A true JPS5352354A (en) | 1978-05-12 |
Family
ID=14954840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12722676A Pending JPS5352354A (en) | 1976-10-25 | 1976-10-25 | Semiconductor local heating method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5352354A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5563818A (en) * | 1978-11-06 | 1980-05-14 | Nec Corp | Manufacture of semiconductor device |
FR2445619A1 (en) * | 1978-12-27 | 1980-07-25 | Western Electric Co | METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE |
JPS55128881A (en) * | 1979-03-28 | 1980-10-06 | Matsushita Electric Ind Co Ltd | Method of fabricating semiconductor device |
JPS572544A (en) * | 1980-06-06 | 1982-01-07 | Hitachi Ltd | Manufacture of semiconductor device |
JPS61124126A (en) * | 1984-11-20 | 1986-06-11 | Nec Kansai Ltd | Manufacture of semiconductor device |
-
1976
- 1976-10-25 JP JP12722676A patent/JPS5352354A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5563818A (en) * | 1978-11-06 | 1980-05-14 | Nec Corp | Manufacture of semiconductor device |
JPS6140127B2 (en) * | 1978-11-06 | 1986-09-08 | Nippon Electric Co | |
FR2445619A1 (en) * | 1978-12-27 | 1980-07-25 | Western Electric Co | METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE |
JPS55128881A (en) * | 1979-03-28 | 1980-10-06 | Matsushita Electric Ind Co Ltd | Method of fabricating semiconductor device |
JPS572544A (en) * | 1980-06-06 | 1982-01-07 | Hitachi Ltd | Manufacture of semiconductor device |
JPS61124126A (en) * | 1984-11-20 | 1986-06-11 | Nec Kansai Ltd | Manufacture of semiconductor device |
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