JPS5352354A - Semiconductor local heating method - Google Patents

Semiconductor local heating method

Info

Publication number
JPS5352354A
JPS5352354A JP12722676A JP12722676A JPS5352354A JP S5352354 A JPS5352354 A JP S5352354A JP 12722676 A JP12722676 A JP 12722676A JP 12722676 A JP12722676 A JP 12722676A JP S5352354 A JPS5352354 A JP S5352354A
Authority
JP
Japan
Prior art keywords
heating method
local heating
semiconductor local
semiconductor
impractical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12722676A
Other languages
Japanese (ja)
Inventor
Nobuo Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12722676A priority Critical patent/JPS5352354A/en
Publication of JPS5352354A publication Critical patent/JPS5352354A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: The modes of heat treatment are made various and such a treatment method which had been impractical with conventional heat treatments is made possible by using a laser beam in locally heating a semiconductor wafer.
COPYRIGHT: (C)1978,JPO&Japio
JP12722676A 1976-10-25 1976-10-25 Semiconductor local heating method Pending JPS5352354A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12722676A JPS5352354A (en) 1976-10-25 1976-10-25 Semiconductor local heating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12722676A JPS5352354A (en) 1976-10-25 1976-10-25 Semiconductor local heating method

Publications (1)

Publication Number Publication Date
JPS5352354A true JPS5352354A (en) 1978-05-12

Family

ID=14954840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12722676A Pending JPS5352354A (en) 1976-10-25 1976-10-25 Semiconductor local heating method

Country Status (1)

Country Link
JP (1) JPS5352354A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563818A (en) * 1978-11-06 1980-05-14 Nec Corp Manufacture of semiconductor device
FR2445619A1 (en) * 1978-12-27 1980-07-25 Western Electric Co METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
JPS55128881A (en) * 1979-03-28 1980-10-06 Matsushita Electric Ind Co Ltd Method of fabricating semiconductor device
JPS572544A (en) * 1980-06-06 1982-01-07 Hitachi Ltd Manufacture of semiconductor device
JPS61124126A (en) * 1984-11-20 1986-06-11 Nec Kansai Ltd Manufacture of semiconductor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563818A (en) * 1978-11-06 1980-05-14 Nec Corp Manufacture of semiconductor device
JPS6140127B2 (en) * 1978-11-06 1986-09-08 Nippon Electric Co
FR2445619A1 (en) * 1978-12-27 1980-07-25 Western Electric Co METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
JPS55128881A (en) * 1979-03-28 1980-10-06 Matsushita Electric Ind Co Ltd Method of fabricating semiconductor device
JPS572544A (en) * 1980-06-06 1982-01-07 Hitachi Ltd Manufacture of semiconductor device
JPS61124126A (en) * 1984-11-20 1986-06-11 Nec Kansai Ltd Manufacture of semiconductor device

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