JPS6314371Y2 - - Google Patents

Info

Publication number
JPS6314371Y2
JPS6314371Y2 JP9924481U JP9924481U JPS6314371Y2 JP S6314371 Y2 JPS6314371 Y2 JP S6314371Y2 JP 9924481 U JP9924481 U JP 9924481U JP 9924481 U JP9924481 U JP 9924481U JP S6314371 Y2 JPS6314371 Y2 JP S6314371Y2
Authority
JP
Japan
Prior art keywords
pressure
gas
branch point
filter
cut valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9924481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5823158U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9924481U priority Critical patent/JPS5823158U/ja
Publication of JPS5823158U publication Critical patent/JPS5823158U/ja
Application granted granted Critical
Publication of JPS6314371Y2 publication Critical patent/JPS6314371Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP9924481U 1981-07-03 1981-07-03 電子線装置等のガス導入装置 Granted JPS5823158U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9924481U JPS5823158U (ja) 1981-07-03 1981-07-03 電子線装置等のガス導入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9924481U JPS5823158U (ja) 1981-07-03 1981-07-03 電子線装置等のガス導入装置

Publications (2)

Publication Number Publication Date
JPS5823158U JPS5823158U (ja) 1983-02-14
JPS6314371Y2 true JPS6314371Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-22

Family

ID=29893985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9924481U Granted JPS5823158U (ja) 1981-07-03 1981-07-03 電子線装置等のガス導入装置

Country Status (1)

Country Link
JP (1) JPS5823158U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4930754B2 (ja) 2006-01-25 2012-05-16 エスアイアイ・ナノテクノロジー株式会社 荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPS5823158U (ja) 1983-02-14

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