JPS6314257B2 - - Google Patents
Info
- Publication number
- JPS6314257B2 JPS6314257B2 JP57008851A JP885182A JPS6314257B2 JP S6314257 B2 JPS6314257 B2 JP S6314257B2 JP 57008851 A JP57008851 A JP 57008851A JP 885182 A JP885182 A JP 885182A JP S6314257 B2 JPS6314257 B2 JP S6314257B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- space
- clean
- work
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 claims description 27
- 238000004887 air purification Methods 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 2
- 125000006850 spacer group Chemical group 0.000 claims 1
- 230000003749 cleanliness Effects 0.000 description 31
- 238000005192 partition Methods 0.000 description 18
- 238000004378 air conditioning Methods 0.000 description 17
- 230000006872 improvement Effects 0.000 description 14
- 238000012423 maintenance Methods 0.000 description 12
- 230000003014 reinforcing effect Effects 0.000 description 10
- 239000000428 dust Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- 238000000149 argon plasma sintering Methods 0.000 description 8
- 238000005286 illumination Methods 0.000 description 8
- 238000009434 installation Methods 0.000 description 7
- 238000010276 construction Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000011045 prefiltration Methods 0.000 description 5
- 230000014759 maintenance of location Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000004080 punching Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000001143 conditioned effect Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002023 wood Substances 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
- E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
- F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
Landscapes
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57008851A JPS58127033A (ja) | 1982-01-25 | 1982-01-25 | 清浄室装置 |
KR1019830000169A KR910006190B1 (ko) | 1982-01-25 | 1983-01-18 | 청정실장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57008851A JPS58127033A (ja) | 1982-01-25 | 1982-01-25 | 清浄室装置 |
Related Child Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59121704A Division JPS6036838A (ja) | 1984-06-15 | 1984-06-15 | 清浄室装置 |
JP62035537A Division JPH0686951B2 (ja) | 1987-02-20 | 1987-02-20 | 清浄室装置 |
JP16075289A Division JPH02133737A (ja) | 1989-06-26 | 1989-06-26 | 清浄室装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58127033A JPS58127033A (ja) | 1983-07-28 |
JPS6314257B2 true JPS6314257B2 (fr) | 1988-03-30 |
Family
ID=11704237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57008851A Granted JPS58127033A (ja) | 1982-01-25 | 1982-01-25 | 清浄室装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS58127033A (fr) |
KR (1) | KR910006190B1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011080617A (ja) * | 2009-10-05 | 2011-04-21 | Shinko Kogyo Co Ltd | 2台給気ファンを備えた空気調和装置 |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5965716U (ja) * | 1982-10-27 | 1984-05-02 | 株式会社竹中工務店 | 空気清浄装置 |
JPS6071830A (ja) * | 1983-09-29 | 1985-04-23 | Hitachi Plant Eng & Constr Co Ltd | 組替式局所環境制御室 |
EP0183709A1 (fr) * | 1984-03-12 | 1986-06-11 | FOSTER, Leo J. | Systeme portatif permettant de produire un espace d'air propre |
US4586486A (en) * | 1984-07-06 | 1986-05-06 | National Air Systems, Inc. | Multilevel air distribution panel for air ventilation hood |
JPS6164313A (ja) * | 1984-09-07 | 1986-04-02 | Toyo Netsu Kogyo Kk | フアンフイルタ−ユニツト |
JPS61114236U (fr) * | 1984-12-27 | 1986-07-19 | ||
JPS626630U (fr) * | 1985-06-25 | 1987-01-16 | ||
JPH021775Y2 (fr) * | 1985-09-25 | 1990-01-17 | ||
WO1987003356A1 (fr) * | 1985-11-26 | 1987-06-04 | Shimizu Construction Co., Ltd. | Chambre avec purification d'air |
JPS63148039A (ja) * | 1986-12-10 | 1988-06-20 | Sanki Eng Co Ltd | 清浄作業室の清浄方法 |
JP2526071B2 (ja) * | 1987-09-14 | 1996-08-21 | 株式会社竹中工務店 | 局所循環型クリ―ンル―ム |
JP2816225B2 (ja) * | 1990-03-22 | 1998-10-27 | 株式会社日立製作所 | 空気清浄システム |
US5401212A (en) * | 1990-08-29 | 1995-03-28 | Intelligent Enclosures Corporation | Environmental control system |
US5195922A (en) * | 1990-08-29 | 1993-03-23 | Intelligent Enclosures Corporation | Environmental control system |
US5431599A (en) * | 1990-08-29 | 1995-07-11 | Intelligent Enclosures Corporation | Environmental control system |
US20010039715A1 (en) * | 1999-11-02 | 2001-11-15 | Pommer | Substrate manufacturing plant having minimum footprint skinned lines |
KR20030094438A (ko) * | 2002-06-04 | 2003-12-12 | 주식회사선양테크 | 이동식 공기청정실 |
JP2008229830A (ja) | 2007-03-23 | 2008-10-02 | Showa Denko Kk | 円盤状基板の製造方法 |
JP5513989B2 (ja) * | 2010-05-27 | 2014-06-04 | 株式会社竹中工務店 | クリーンルーム |
CN106345190B (zh) * | 2016-10-25 | 2018-11-20 | 张家口和圣科技发展有限公司 | 一种除尘筒脉冲反吹装置 |
JP6957308B2 (ja) * | 2017-10-20 | 2021-11-02 | 株式会社テクノ菱和 | 空調システム |
JP7491773B2 (ja) * | 2020-08-19 | 2024-05-28 | 株式会社日立プラントサービス | 給排気システム及びクリーンルームシステム |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56162336A (en) * | 1980-05-16 | 1981-12-14 | Hitachi Ltd | Air conditioner |
JPS56162335A (en) * | 1980-05-16 | 1981-12-14 | Hitachi Ltd | Air conditioner |
-
1982
- 1982-01-25 JP JP57008851A patent/JPS58127033A/ja active Granted
-
1983
- 1983-01-18 KR KR1019830000169A patent/KR910006190B1/ko not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56162336A (en) * | 1980-05-16 | 1981-12-14 | Hitachi Ltd | Air conditioner |
JPS56162335A (en) * | 1980-05-16 | 1981-12-14 | Hitachi Ltd | Air conditioner |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011080617A (ja) * | 2009-10-05 | 2011-04-21 | Shinko Kogyo Co Ltd | 2台給気ファンを備えた空気調和装置 |
Also Published As
Publication number | Publication date |
---|---|
KR840003329A (ko) | 1984-08-20 |
JPS58127033A (ja) | 1983-07-28 |
KR910006190B1 (ko) | 1991-08-16 |
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