JPS63137162A - レ−ザ蒸着式多層膜形成装置 - Google Patents

レ−ザ蒸着式多層膜形成装置

Info

Publication number
JPS63137162A
JPS63137162A JP28372186A JP28372186A JPS63137162A JP S63137162 A JPS63137162 A JP S63137162A JP 28372186 A JP28372186 A JP 28372186A JP 28372186 A JP28372186 A JP 28372186A JP S63137162 A JPS63137162 A JP S63137162A
Authority
JP
Japan
Prior art keywords
laser
base material
multilayer film
ceramic materials
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28372186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575825B2 (enExample
Inventor
Kazuhiro Oka
岡　一宏
Kohei Murakami
光平 村上
Masaharu Moriyasu
雅治 森安
Megumi Omine
大峯　恩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP28372186A priority Critical patent/JPS63137162A/ja
Publication of JPS63137162A publication Critical patent/JPS63137162A/ja
Publication of JPH0575825B2 publication Critical patent/JPH0575825B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP28372186A 1986-11-28 1986-11-28 レ−ザ蒸着式多層膜形成装置 Granted JPS63137162A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28372186A JPS63137162A (ja) 1986-11-28 1986-11-28 レ−ザ蒸着式多層膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28372186A JPS63137162A (ja) 1986-11-28 1986-11-28 レ−ザ蒸着式多層膜形成装置

Publications (2)

Publication Number Publication Date
JPS63137162A true JPS63137162A (ja) 1988-06-09
JPH0575825B2 JPH0575825B2 (enExample) 1993-10-21

Family

ID=17669228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28372186A Granted JPS63137162A (ja) 1986-11-28 1986-11-28 レ−ザ蒸着式多層膜形成装置

Country Status (1)

Country Link
JP (1) JPS63137162A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0830357A (ja) * 1994-07-20 1996-02-02 Nec Gumma Ltd 冷却用ファン制御システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931865A (ja) * 1982-08-13 1984-02-21 Ulvac Corp カプセル型蒸発源
JPS59116373A (ja) * 1982-12-22 1984-07-05 Agency Of Ind Science & Technol レ−ザ蒸着装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931865A (ja) * 1982-08-13 1984-02-21 Ulvac Corp カプセル型蒸発源
JPS59116373A (ja) * 1982-12-22 1984-07-05 Agency Of Ind Science & Technol レ−ザ蒸着装置

Also Published As

Publication number Publication date
JPH0575825B2 (enExample) 1993-10-21

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