JPS63135266U - - Google Patents

Info

Publication number
JPS63135266U
JPS63135266U JP2754487U JP2754487U JPS63135266U JP S63135266 U JPS63135266 U JP S63135266U JP 2754487 U JP2754487 U JP 2754487U JP 2754487 U JP2754487 U JP 2754487U JP S63135266 U JPS63135266 U JP S63135266U
Authority
JP
Japan
Prior art keywords
cylindrical object
test object
signal
optical system
inspection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2754487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2754487U priority Critical patent/JPS63135266U/ja
Publication of JPS63135266U publication Critical patent/JPS63135266U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2754487U 1987-02-26 1987-02-26 Pending JPS63135266U (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2754487U JPS63135266U (es) 1987-02-26 1987-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2754487U JPS63135266U (es) 1987-02-26 1987-02-26

Publications (1)

Publication Number Publication Date
JPS63135266U true JPS63135266U (es) 1988-09-05

Family

ID=30829680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2754487U Pending JPS63135266U (es) 1987-02-26 1987-02-26

Country Status (1)

Country Link
JP (1) JPS63135266U (es)

Similar Documents

Publication Publication Date Title
KR950034318A (ko) 웨이퍼 직경 및 단면형상 측정장치
JP2000031245A (ja) ウェーハノッチ位置検出装置
JPS63135266U (es)
JP4229251B2 (ja) Ｐｅｔプリフォームの異物検査装置
JPH0227242A (ja) ケーブルの表面欠陥検出装置
JPH03150452A (ja) びん内容液中の異物検出装置
JPH0295205A (ja) 内面画像入力装置
JP2858194B2 (ja) Ｏリング検査方法
JPH07103740A (ja) 円筒形物体の検出装置およびその検出方法
JP2518967Y2 (ja) 円筒内壁面の欠陥検査用撮像装置
JPH10221021A (ja) 寸法測定及び形状検査装置と検査方法
JPS6344151A (ja) 外観検査装置
JPS6082904A (ja) 被検物体の輪郭検出方法
JP2623115B2 (ja) 外観検査装置
JPS6375545A (ja) 外観検査装置
JPS63228049A (ja) 欠陥検査装置
JPH05180627A (ja) 走査型管内形状検査装置
JPS57137844A (en) Detector for defect
JPS6423145A (en) Optical appearance inspection device
JPH02115152U (es)
JPH0558497B2 (es)
JPS6116440A (ja) フレアひび割れ検出装置
JPH02109241U (es)
JPS5720650A (en) Inspecting method for annular body
JPS60210745A (ja) 視覚センサシステム