JPS6313343B2 - - Google Patents

Info

Publication number
JPS6313343B2
JPS6313343B2 JP56036382A JP3638281A JPS6313343B2 JP S6313343 B2 JPS6313343 B2 JP S6313343B2 JP 56036382 A JP56036382 A JP 56036382A JP 3638281 A JP3638281 A JP 3638281A JP S6313343 B2 JPS6313343 B2 JP S6313343B2
Authority
JP
Japan
Prior art keywords
silicon
film
substrate
vapor deposition
nitrogen compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56036382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57152132A (en
Inventor
Yoshimi Shiotani
Kanetake Takasaki
Mamoru Maeda
Mikio Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3638281A priority Critical patent/JPS57152132A/ja
Publication of JPS57152132A publication Critical patent/JPS57152132A/ja
Publication of JPS6313343B2 publication Critical patent/JPS6313343B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C23C16/5096—Flat-bed apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
JP3638281A 1981-03-13 1981-03-13 Chemical vapor growing method Granted JPS57152132A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3638281A JPS57152132A (en) 1981-03-13 1981-03-13 Chemical vapor growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3638281A JPS57152132A (en) 1981-03-13 1981-03-13 Chemical vapor growing method

Publications (2)

Publication Number Publication Date
JPS57152132A JPS57152132A (en) 1982-09-20
JPS6313343B2 true JPS6313343B2 (enrdf_load_stackoverflow) 1988-03-25

Family

ID=12468291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3638281A Granted JPS57152132A (en) 1981-03-13 1981-03-13 Chemical vapor growing method

Country Status (1)

Country Link
JP (1) JPS57152132A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5279448A (en) * 1975-12-25 1977-07-04 Toyota Motor Corp Fixing device for tiltable handwheel
JPS5996736A (ja) * 1982-11-26 1984-06-04 Hitachi Ltd 半導体装置
JPS61145834A (ja) * 1984-12-20 1986-07-03 Toshiba Corp 半導体装置の製造方法
JPS61256735A (ja) * 1985-05-10 1986-11-14 Nec Corp 半導体装置及びその製造方法
JPS62166530A (ja) * 1986-01-20 1987-07-23 Toshiba Corp 半導体装置の製造方法
JP2659193B2 (ja) * 1987-08-20 1997-09-30 日本電気株式会社 半導体装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOLID-STATE SCIENCE AND TECHNOLOGY=1977 *

Also Published As

Publication number Publication date
JPS57152132A (en) 1982-09-20

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