JPS63128661U - - Google Patents
Info
- Publication number
- JPS63128661U JPS63128661U JP2144987U JP2144987U JPS63128661U JP S63128661 U JPS63128661 U JP S63128661U JP 2144987 U JP2144987 U JP 2144987U JP 2144987 U JP2144987 U JP 2144987U JP S63128661 U JPS63128661 U JP S63128661U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- analysis
- chamber
- pretreatment
- predetermined position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000037431 insertion Effects 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims 2
- 238000005211 surface analysis Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 230000005284 excitation Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2144987U JPS63128661U (enrdf_load_html_response) | 1987-02-16 | 1987-02-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2144987U JPS63128661U (enrdf_load_html_response) | 1987-02-16 | 1987-02-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63128661U true JPS63128661U (enrdf_load_html_response) | 1988-08-23 |
Family
ID=30817906
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2144987U Pending JPS63128661U (enrdf_load_html_response) | 1987-02-16 | 1987-02-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63128661U (enrdf_load_html_response) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5327484A (en) * | 1976-08-27 | 1978-03-14 | Hitachi Ltd | Ion microanalyzer |
-
1987
- 1987-02-16 JP JP2144987U patent/JPS63128661U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5327484A (en) * | 1976-08-27 | 1978-03-14 | Hitachi Ltd | Ion microanalyzer |
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