JPS5327484A - Ion microanalyzer - Google Patents

Ion microanalyzer

Info

Publication number
JPS5327484A
JPS5327484A JP10159276A JP10159276A JPS5327484A JP S5327484 A JPS5327484 A JP S5327484A JP 10159276 A JP10159276 A JP 10159276A JP 10159276 A JP10159276 A JP 10159276A JP S5327484 A JPS5327484 A JP S5327484A
Authority
JP
Japan
Prior art keywords
ion microanalyzer
microanalyzer
ion
providing
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10159276A
Other languages
Japanese (ja)
Inventor
Hiroshi Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10159276A priority Critical patent/JPS5327484A/en
Publication of JPS5327484A publication Critical patent/JPS5327484A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To carry out analysis in the depth direction in a short time by providing an air-tight chamber and removing surface layer of a material.
JP10159276A 1976-08-27 1976-08-27 Ion microanalyzer Pending JPS5327484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10159276A JPS5327484A (en) 1976-08-27 1976-08-27 Ion microanalyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10159276A JPS5327484A (en) 1976-08-27 1976-08-27 Ion microanalyzer

Publications (1)

Publication Number Publication Date
JPS5327484A true JPS5327484A (en) 1978-03-14

Family

ID=14304644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10159276A Pending JPS5327484A (en) 1976-08-27 1976-08-27 Ion microanalyzer

Country Status (1)

Country Link
JP (1) JPS5327484A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61135460U (en) * 1985-02-14 1986-08-23
JPS63128661U (en) * 1987-02-16 1988-08-23

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61135460U (en) * 1985-02-14 1986-08-23
JPH0314775Y2 (en) * 1985-02-14 1991-04-02
JPS63128661U (en) * 1987-02-16 1988-08-23

Similar Documents

Publication Publication Date Title
JPS5211995A (en) Plastic card making process
JPS52125998A (en) Ion source
JPS5416097A (en) Heavy ion accelerator
JPS52106100A (en) Method of reducing irradtated ion exchange material volume
JPS5445496A (en) Tandeum ion accelerator
CA1015467A (en) Device for mass analysis and structure analysis of a surface layer by means of ion scattering
JPS5327484A (en) Ion microanalyzer
JPS5441075A (en) Conveying device between atmospheric pressure and vacuum
JPS5235376A (en) Electric dust collector
JPS51141999A (en) Ion source and ion accelerator
JPS529490A (en) Liquid penetrating portion of reference electrode
IL50328A (en) Positive active material for primary batteries having highenergy density
GB2014355B (en) Ion sources
SU633509A1 (en) Device for cutting and sorting grafting material by thickness
JPS5219905A (en) Acousticon
JPS5235775A (en) Method of forming sliding surface in vacuum apparatus
JPS5532195B2 (en)
JPS5214374A (en) Treatment equpment for ion beam
GB2028575B (en) Ion sources
JPS5257884A (en) Solid surface analyzer
JPS52130276A (en) Ion feedback electron multiplier
JPS52137345A (en) Corona discharge device
JPS5238484A (en) Method of ionplating
JPS5298633A (en) Surface treating method by vacuum dicharge
JPS5219373A (en) Centrifuge