JPS5235775A - Method of forming sliding surface in vacuum apparatus - Google Patents

Method of forming sliding surface in vacuum apparatus

Info

Publication number
JPS5235775A
JPS5235775A JP11228775A JP11228775A JPS5235775A JP S5235775 A JPS5235775 A JP S5235775A JP 11228775 A JP11228775 A JP 11228775A JP 11228775 A JP11228775 A JP 11228775A JP S5235775 A JPS5235775 A JP S5235775A
Authority
JP
Japan
Prior art keywords
sliding surface
vacuum apparatus
forming sliding
forming
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11228775A
Other languages
Japanese (ja)
Inventor
Yukihiko Okazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP11228775A priority Critical patent/JPS5235775A/en
Publication of JPS5235775A publication Critical patent/JPS5235775A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:A method of firmly coating a lubricant on a sliding surface in a vacuum apparatus.
JP11228775A 1975-09-17 1975-09-17 Method of forming sliding surface in vacuum apparatus Pending JPS5235775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11228775A JPS5235775A (en) 1975-09-17 1975-09-17 Method of forming sliding surface in vacuum apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11228775A JPS5235775A (en) 1975-09-17 1975-09-17 Method of forming sliding surface in vacuum apparatus

Publications (1)

Publication Number Publication Date
JPS5235775A true JPS5235775A (en) 1977-03-18

Family

ID=14582906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11228775A Pending JPS5235775A (en) 1975-09-17 1975-09-17 Method of forming sliding surface in vacuum apparatus

Country Status (1)

Country Link
JP (1) JPS5235775A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5459450A (en) * 1977-10-17 1979-05-14 Toray Industries Needle for processing fiber
US4394210A (en) * 1980-03-31 1983-07-19 Futaba Denshi Kogyo K.K. Process for forming a lead film
FR2544747A1 (en) * 1983-04-22 1984-10-26 White Eng Corp METHOD OF PROTECTING AGAINST FRICTION DAMAGE
GB2240343A (en) * 1990-01-19 1991-07-31 Honda Motor Co Ltd Crystalline lead alloy sliding surface
JPH0540151U (en) * 1991-09-02 1993-05-28 瑛二 稲野辺 Bag

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5459450A (en) * 1977-10-17 1979-05-14 Toray Industries Needle for processing fiber
JPS6117518B2 (en) * 1977-10-17 1986-05-08 Toray Industries
US4394210A (en) * 1980-03-31 1983-07-19 Futaba Denshi Kogyo K.K. Process for forming a lead film
FR2544747A1 (en) * 1983-04-22 1984-10-26 White Eng Corp METHOD OF PROTECTING AGAINST FRICTION DAMAGE
GB2240343A (en) * 1990-01-19 1991-07-31 Honda Motor Co Ltd Crystalline lead alloy sliding surface
GB2240343B (en) * 1990-01-19 1993-11-17 Honda Motor Co Ltd Slide member
US5310606A (en) * 1990-01-19 1994-05-10 Honda Giken Kogyo Kabushiki Kaisha Slide member
US5468567A (en) * 1990-01-19 1995-11-21 Honda Giken Kogyo Kabushiki Kaisha Slide member
JPH0540151U (en) * 1991-09-02 1993-05-28 瑛二 稲野辺 Bag

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