JPS63123719A - 搬送装置 - Google Patents

搬送装置

Info

Publication number
JPS63123719A
JPS63123719A JP26659686A JP26659686A JPS63123719A JP S63123719 A JPS63123719 A JP S63123719A JP 26659686 A JP26659686 A JP 26659686A JP 26659686 A JP26659686 A JP 26659686A JP S63123719 A JPS63123719 A JP S63123719A
Authority
JP
Japan
Prior art keywords
magnet
conveyance
magnetic fluid
magnetic
outer frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26659686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545490B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Giichi Fujino
藤野 義一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seibu Electric and Machinery Co Ltd
Original Assignee
Seibu Electric and Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seibu Electric and Machinery Co Ltd filed Critical Seibu Electric and Machinery Co Ltd
Priority to JP26659686A priority Critical patent/JPS63123719A/ja
Publication of JPS63123719A publication Critical patent/JPS63123719A/ja
Publication of JPH0545490B2 publication Critical patent/JPH0545490B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
JP26659686A 1986-11-11 1986-11-11 搬送装置 Granted JPS63123719A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26659686A JPS63123719A (ja) 1986-11-11 1986-11-11 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26659686A JPS63123719A (ja) 1986-11-11 1986-11-11 搬送装置

Publications (2)

Publication Number Publication Date
JPS63123719A true JPS63123719A (ja) 1988-05-27
JPH0545490B2 JPH0545490B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-09

Family

ID=17433006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26659686A Granted JPS63123719A (ja) 1986-11-11 1986-11-11 搬送装置

Country Status (1)

Country Link
JP (1) JPS63123719A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5440997A (en) * 1993-09-27 1995-08-15 Crowley; Walter A. Magnetic suspension transportation system and method
DE102007044442A1 (de) * 2007-09-14 2009-03-19 Technische Universität Ilmenau Vorrichtung und Verfahren zum translatorischen Bewegen von nichtmagnetischen Gegenständen
WO2019171456A1 (ja) * 2018-03-06 2019-09-12 株式会社Fuji 搬送装置、及び搬送路

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6118305A (ja) * 1984-07-05 1986-01-27 Hitachi Kiden Kogyo Ltd 搬送装置
JPS61236302A (ja) * 1985-04-08 1986-10-21 Hitachi Kiden Kogyo Ltd クリーンルームなどに用いる搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6118305A (ja) * 1984-07-05 1986-01-27 Hitachi Kiden Kogyo Ltd 搬送装置
JPS61236302A (ja) * 1985-04-08 1986-10-21 Hitachi Kiden Kogyo Ltd クリーンルームなどに用いる搬送装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5440997A (en) * 1993-09-27 1995-08-15 Crowley; Walter A. Magnetic suspension transportation system and method
DE102007044442A1 (de) * 2007-09-14 2009-03-19 Technische Universität Ilmenau Vorrichtung und Verfahren zum translatorischen Bewegen von nichtmagnetischen Gegenständen
DE102007044442B4 (de) * 2007-09-14 2010-10-28 Technische Universität Ilmenau Vorrichtung und Verfahren zum translatorischen Bewegen von nichtmagnetischen Gegenständen
WO2019171456A1 (ja) * 2018-03-06 2019-09-12 株式会社Fuji 搬送装置、及び搬送路
JPWO2019171456A1 (ja) * 2018-03-06 2020-12-03 株式会社Fuji 搬送装置、及び搬送路

Also Published As

Publication number Publication date
JPH0545490B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-09

Similar Documents

Publication Publication Date Title
KR960002519A (ko) 전자 얼라인먼트와 주사 장치
KR102005275B1 (ko) 자기 부상 이송 장치
JP2012158467A (ja) リニアモータで駆動されるエア浮上搬送装置及びシステム
JPS63123719A (ja) 搬送装置
KR101939352B1 (ko) 자기 부상 이송 장치
JPH0252829U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63194502A (ja) 磁気浮上搬送装置
KR102232179B1 (ko) 자기 부상이송 장치
JPH0741992B2 (ja) 磁気浮上搬送装置
JP2547403B2 (ja) 真空装置用磁気浮上搬送装置
JPH0638427Y2 (ja) 磁気浮上型ウエハ搬送装置
JPH0537773U (ja) 交流磁気浮上搬送装置
KR20220006317A (ko) 자기 부상 이송 장치
JPS6118305A (ja) 搬送装置
CN219085951U (zh) 一种半导体自动搬运装置
JP2882850B2 (ja) 交流磁気浮上搬送装置
JP2670169B2 (ja) 磁気浮上搬送装置
JPH07118847B2 (ja) 搬送装置
JPH0559010B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61236304A (ja) 搬送装置
JPS61199403A (ja) リニアモ−タ使用の搬送装置
JPH0712346Y2 (ja) 磁気浮上装置
JPS63174895A (ja) 磁気浮上式搬送マニピユレ−タ
JPH04148727A (ja) 磁気浮上搬送装置
JPH0534881B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees