JPH0559010B2 - - Google Patents
Info
- Publication number
- JPH0559010B2 JPH0559010B2 JP1017881A JP1788189A JPH0559010B2 JP H0559010 B2 JPH0559010 B2 JP H0559010B2 JP 1017881 A JP1017881 A JP 1017881A JP 1788189 A JP1788189 A JP 1788189A JP H0559010 B2 JPH0559010 B2 JP H0559010B2
- Authority
- JP
- Japan
- Prior art keywords
- guide rail
- vacuum
- stator
- vacuum chamber
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Non-Mechanical Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1788189A JPH02198920A (ja) | 1989-01-28 | 1989-01-28 | 磁気浮上形真空内搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1788189A JPH02198920A (ja) | 1989-01-28 | 1989-01-28 | 磁気浮上形真空内搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02198920A JPH02198920A (ja) | 1990-08-07 |
| JPH0559010B2 true JPH0559010B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-30 |
Family
ID=11956042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1788189A Granted JPH02198920A (ja) | 1989-01-28 | 1989-01-28 | 磁気浮上形真空内搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02198920A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5925956A (en) * | 1995-06-30 | 1999-07-20 | Nikon Corporation | Stage construction incorporating magnetically levitated movable stage |
| JP5176097B2 (ja) * | 2005-08-25 | 2013-04-03 | 国立大学法人富山大学 | 磁気浮上装置並びに磁気浮上方法 |
| JP5419384B2 (ja) | 2008-05-20 | 2014-02-19 | 東京エレクトロン株式会社 | 真空処理装置 |
| JP5687049B2 (ja) * | 2010-12-27 | 2015-03-18 | キヤノンアネルバ株式会社 | 搬送装置及び真空処理装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55125862U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1979-03-01 | 1980-09-05 | ||
| JPS60261302A (ja) * | 1984-06-06 | 1985-12-24 | Irie Koken Kk | 高真空中の物品搬送装置 |
-
1989
- 1989-01-28 JP JP1788189A patent/JPH02198920A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02198920A (ja) | 1990-08-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |