JPH02198920A - 磁気浮上形真空内搬送装置 - Google Patents

磁気浮上形真空内搬送装置

Info

Publication number
JPH02198920A
JPH02198920A JP1788189A JP1788189A JPH02198920A JP H02198920 A JPH02198920 A JP H02198920A JP 1788189 A JP1788189 A JP 1788189A JP 1788189 A JP1788189 A JP 1788189A JP H02198920 A JPH02198920 A JP H02198920A
Authority
JP
Japan
Prior art keywords
vacuum
pipe
guide rail
stator
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1788189A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0559010B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kuniaki Miura
邦明 三浦
Masanori Nozaki
野崎　正憲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sukegawa Electric Co Ltd
Original Assignee
Sukegawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sukegawa Electric Co Ltd filed Critical Sukegawa Electric Co Ltd
Priority to JP1788189A priority Critical patent/JPH02198920A/ja
Publication of JPH02198920A publication Critical patent/JPH02198920A/ja
Publication of JPH0559010B2 publication Critical patent/JPH0559010B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
JP1788189A 1989-01-28 1989-01-28 磁気浮上形真空内搬送装置 Granted JPH02198920A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1788189A JPH02198920A (ja) 1989-01-28 1989-01-28 磁気浮上形真空内搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1788189A JPH02198920A (ja) 1989-01-28 1989-01-28 磁気浮上形真空内搬送装置

Publications (2)

Publication Number Publication Date
JPH02198920A true JPH02198920A (ja) 1990-08-07
JPH0559010B2 JPH0559010B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-30

Family

ID=11956042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1788189A Granted JPH02198920A (ja) 1989-01-28 1989-01-28 磁気浮上形真空内搬送装置

Country Status (1)

Country Link
JP (1) JPH02198920A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5925956A (en) * 1995-06-30 1999-07-20 Nikon Corporation Stage construction incorporating magnetically levitated movable stage
JP2007084338A (ja) * 2005-08-25 2007-04-05 Toyama Univ 磁気浮上装置並びに磁気浮上方法
WO2009142197A1 (ja) * 2008-05-20 2009-11-26 東京エレクトロン株式会社 真空処理装置
JP2012136320A (ja) * 2010-12-27 2012-07-19 Canon Anelva Corp 搬送装置及び真空処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125862U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-03-01 1980-09-05
JPS60261302A (ja) * 1984-06-06 1985-12-24 Irie Koken Kk 高真空中の物品搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125862U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-03-01 1980-09-05
JPS60261302A (ja) * 1984-06-06 1985-12-24 Irie Koken Kk 高真空中の物品搬送装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5925956A (en) * 1995-06-30 1999-07-20 Nikon Corporation Stage construction incorporating magnetically levitated movable stage
JP2007084338A (ja) * 2005-08-25 2007-04-05 Toyama Univ 磁気浮上装置並びに磁気浮上方法
WO2009142197A1 (ja) * 2008-05-20 2009-11-26 東京エレクトロン株式会社 真空処理装置
US8522958B2 (en) 2008-05-20 2013-09-03 Tokyo Electron Limited Vacuum processing apparatus
JP2012136320A (ja) * 2010-12-27 2012-07-19 Canon Anelva Corp 搬送装置及び真空処理装置

Also Published As

Publication number Publication date
JPH0559010B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-30

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees