JPS63117489A - 薄膜張付装置用薄膜仮付部材 - Google Patents
薄膜張付装置用薄膜仮付部材Info
- Publication number
- JPS63117489A JPS63117489A JP26423786A JP26423786A JPS63117489A JP S63117489 A JPS63117489 A JP S63117489A JP 26423786 A JP26423786 A JP 26423786A JP 26423786 A JP26423786 A JP 26423786A JP S63117489 A JPS63117489 A JP S63117489A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- laminate
- vacuum plate
- roller
- tacking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 212
- 239000000758 substrate Substances 0.000 claims description 88
- 239000011810 insulating material Substances 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 description 46
- 239000012530 fluid Substances 0.000 description 25
- 239000011347 resin Substances 0.000 description 22
- 229920005989 resin Polymers 0.000 description 22
- 239000010408 film Substances 0.000 description 17
- 238000001514 detection method Methods 0.000 description 15
- 238000001179 sorption measurement Methods 0.000 description 15
- 238000012937 correction Methods 0.000 description 11
- 238000000926 separation method Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 9
- 239000007921 spray Substances 0.000 description 8
- 238000003860 storage Methods 0.000 description 8
- 238000003475 lamination Methods 0.000 description 7
- 238000013459 approach Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 206010040954 Skin wrinkling Diseases 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 230000037303 wrinkles Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- -1 polytetrafluoroethylene Polymers 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 239000010949 copper Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000007665 sagging Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004035 construction material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Lining Or Joining Of Plastics Or The Like (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26423786A JPS63117489A (ja) | 1986-11-06 | 1986-11-06 | 薄膜張付装置用薄膜仮付部材 |
| US07/116,819 US4909891A (en) | 1986-11-06 | 1987-11-05 | Laminator |
| DE8787116403T DE3778503D1 (de) | 1986-11-06 | 1987-11-06 | Vorrichtung zum herstellen von verbundwerkstoffen. |
| EP87116403A EP0269910B1 (en) | 1986-11-06 | 1987-11-06 | Laminator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26423786A JPS63117489A (ja) | 1986-11-06 | 1986-11-06 | 薄膜張付装置用薄膜仮付部材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63117489A true JPS63117489A (ja) | 1988-05-21 |
| JPH049658B2 JPH049658B2 (enrdf_load_stackoverflow) | 1992-02-20 |
Family
ID=17400390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26423786A Granted JPS63117489A (ja) | 1986-11-06 | 1986-11-06 | 薄膜張付装置用薄膜仮付部材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63117489A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5158639A (en) * | 1990-06-01 | 1992-10-27 | Somar Corporation | Roll conveyance and attachment/detachment device for applying apparatus |
-
1986
- 1986-11-06 JP JP26423786A patent/JPS63117489A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5158639A (en) * | 1990-06-01 | 1992-10-27 | Somar Corporation | Roll conveyance and attachment/detachment device for applying apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH049658B2 (enrdf_load_stackoverflow) | 1992-02-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |