JPS63117488A - 薄膜の張付装置 - Google Patents
薄膜の張付装置Info
- Publication number
- JPS63117488A JPS63117488A JP26423686A JP26423686A JPS63117488A JP S63117488 A JPS63117488 A JP S63117488A JP 26423686 A JP26423686 A JP 26423686A JP 26423686 A JP26423686 A JP 26423686A JP S63117488 A JPS63117488 A JP S63117488A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- laminate
- tacking
- tip
- vacuum plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 262
- 239000000758 substrate Substances 0.000 claims description 86
- 239000011810 insulating material Substances 0.000 claims description 21
- 238000001179 sorption measurement Methods 0.000 claims description 19
- 238000003825 pressing Methods 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 description 44
- 239000012530 fluid Substances 0.000 description 24
- 239000011347 resin Substances 0.000 description 21
- 229920005989 resin Polymers 0.000 description 21
- 239000010408 film Substances 0.000 description 18
- 238000001514 detection method Methods 0.000 description 15
- 238000000926 separation method Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 238000012937 correction Methods 0.000 description 8
- 239000007921 spray Substances 0.000 description 8
- 238000003860 storage Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000003475 lamination Methods 0.000 description 7
- 238000013459 approach Methods 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 230000006835 compression Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000010030 laminating Methods 0.000 description 4
- 230000037303 wrinkles Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- -1 polytetrafluoroethylene Polymers 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 238000007665 sagging Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004035 construction material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Lining Or Joining Of Plastics Or The Like (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26423686A JPS63117488A (ja) | 1986-11-06 | 1986-11-06 | 薄膜の張付装置 |
| US07/116,819 US4909891A (en) | 1986-11-06 | 1987-11-05 | Laminator |
| DE8787116403T DE3778503D1 (de) | 1986-11-06 | 1987-11-06 | Vorrichtung zum herstellen von verbundwerkstoffen. |
| EP87116403A EP0269910B1 (en) | 1986-11-06 | 1987-11-06 | Laminator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26423686A JPS63117488A (ja) | 1986-11-06 | 1986-11-06 | 薄膜の張付装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63117488A true JPS63117488A (ja) | 1988-05-21 |
| JPH049657B2 JPH049657B2 (enrdf_load_stackoverflow) | 1992-02-20 |
Family
ID=17400378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26423686A Granted JPS63117488A (ja) | 1986-11-06 | 1986-11-06 | 薄膜の張付装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63117488A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH037342A (ja) * | 1989-06-04 | 1991-01-14 | Somar Corp | 薄膜張付装置 |
| JPH03205134A (ja) * | 1989-12-31 | 1991-09-06 | Somar Corp | フイルム張付方法及びその実施装置 |
| JPH0412849A (ja) * | 1990-04-28 | 1992-01-17 | Somar Corp | ラミネータ |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2793156B2 (ja) * | 1995-09-29 | 1998-09-03 | 和進工業株式会社 | ラミネータ |
-
1986
- 1986-11-06 JP JP26423686A patent/JPS63117488A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH037342A (ja) * | 1989-06-04 | 1991-01-14 | Somar Corp | 薄膜張付装置 |
| JPH03205134A (ja) * | 1989-12-31 | 1991-09-06 | Somar Corp | フイルム張付方法及びその実施装置 |
| JPH0412849A (ja) * | 1990-04-28 | 1992-01-17 | Somar Corp | ラミネータ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH049657B2 (enrdf_load_stackoverflow) | 1992-02-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |