JPS6311569B2 - - Google Patents
Info
- Publication number
- JPS6311569B2 JPS6311569B2 JP55072767A JP7276780A JPS6311569B2 JP S6311569 B2 JPS6311569 B2 JP S6311569B2 JP 55072767 A JP55072767 A JP 55072767A JP 7276780 A JP7276780 A JP 7276780A JP S6311569 B2 JPS6311569 B2 JP S6311569B2
- Authority
- JP
- Japan
- Prior art keywords
- partition
- gondola
- performance filter
- air
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005192 partition Methods 0.000 claims description 26
- 239000003570 air Substances 0.000 description 25
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 238000004378 air conditioning Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000012080 ambient air Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7276780A JPS57255A (en) | 1980-06-02 | 1980-06-02 | Clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7276780A JPS57255A (en) | 1980-06-02 | 1980-06-02 | Clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57255A JPS57255A (en) | 1982-01-05 |
| JPS6311569B2 true JPS6311569B2 (ko) | 1988-03-15 |
Family
ID=13498850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7276780A Granted JPS57255A (en) | 1980-06-02 | 1980-06-02 | Clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57255A (ko) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59204227A (ja) * | 1983-05-04 | 1984-11-19 | Nec Corp | 清浄装置 |
| JPS6033439A (ja) * | 1983-08-02 | 1985-02-20 | Nippon Muki Kk | 搬送用クリ−ンユニツト並に搬送法 |
| JPH0414507Y2 (ko) * | 1986-12-30 | 1992-03-31 | ||
| JP2529246B2 (ja) * | 1987-03-20 | 1996-08-28 | 松下電器産業株式会社 | クリ−ン空間のメンテナンス装置 |
| JP7238859B2 (ja) | 2020-07-22 | 2023-03-14 | 株式会社ダイフク | 物品搬送車 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5151144A (ja) * | 1974-10-31 | 1976-05-06 | Nippon Telegraph & Telephone | Kuriineakyokyusochi |
-
1980
- 1980-06-02 JP JP7276780A patent/JPS57255A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5151144A (ja) * | 1974-10-31 | 1976-05-06 | Nippon Telegraph & Telephone | Kuriineakyokyusochi |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57255A (en) | 1982-01-05 |
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