JPS6311557U - - Google Patents
Info
- Publication number
- JPS6311557U JPS6311557U JP10587986U JP10587986U JPS6311557U JP S6311557 U JPS6311557 U JP S6311557U JP 10587986 U JP10587986 U JP 10587986U JP 10587986 U JP10587986 U JP 10587986U JP S6311557 U JPS6311557 U JP S6311557U
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- discharge electrode
- evaporation section
- plating apparatus
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 238000007733 ion plating Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10587986U JPS6311557U (enExample) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10587986U JPS6311557U (enExample) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6311557U true JPS6311557U (enExample) | 1988-01-26 |
Family
ID=30980724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10587986U Pending JPS6311557U (enExample) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311557U (enExample) |
-
1986
- 1986-07-10 JP JP10587986U patent/JPS6311557U/ja active Pending
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