JPS6298764A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS6298764A
JPS6298764A JP60240105A JP24010585A JPS6298764A JP S6298764 A JPS6298764 A JP S6298764A JP 60240105 A JP60240105 A JP 60240105A JP 24010585 A JP24010585 A JP 24010585A JP S6298764 A JPS6298764 A JP S6298764A
Authority
JP
Japan
Prior art keywords
electrode
region
well
conductivity type
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60240105A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0243347B2 (enrdf_load_stackoverflow
Inventor
Yoshimitsu Tanaka
義光 田中
Kiyoshi Hosoya
清志 細谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP60240105A priority Critical patent/JPS6298764A/ja
Publication of JPS6298764A publication Critical patent/JPS6298764A/ja
Publication of JPH0243347B2 publication Critical patent/JPH0243347B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/64Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/65Lateral DMOS [LDMOS] FETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/601Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/603Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended drain IGFETs [EDMOS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H10D84/85Complementary IGFETs, e.g. CMOS
    • H10D84/854Complementary IGFETs, e.g. CMOS comprising arrangements for preventing bipolar actions between the different IGFET regions, e.g. arrangements for latchup prevention
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/213Channel regions of field-effect devices
    • H10D62/221Channel regions of field-effect devices of FETs
    • H10D62/235Channel regions of field-effect devices of FETs of IGFETs
    • H10D62/299Channel regions of field-effect devices of FETs of IGFETs having lateral doping variations
    • H10D62/307Channel regions of field-effect devices of FETs of IGFETs having lateral doping variations the doping variations being parallel to the channel lengths
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/393Body regions of DMOS transistors or IGBTs 

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP60240105A 1985-10-25 1985-10-25 半導体装置 Granted JPS6298764A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60240105A JPS6298764A (ja) 1985-10-25 1985-10-25 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60240105A JPS6298764A (ja) 1985-10-25 1985-10-25 半導体装置

Publications (2)

Publication Number Publication Date
JPS6298764A true JPS6298764A (ja) 1987-05-08
JPH0243347B2 JPH0243347B2 (enrdf_load_stackoverflow) 1990-09-28

Family

ID=17054563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60240105A Granted JPS6298764A (ja) 1985-10-25 1985-10-25 半導体装置

Country Status (1)

Country Link
JP (1) JPS6298764A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6825543B2 (en) 2000-12-28 2004-11-30 Canon Kabushiki Kaisha Semiconductor device, method for manufacturing the same, and liquid jet apparatus
US6867457B2 (en) 2002-07-10 2005-03-15 Canon Kabushiki Kaisha Semiconductor device and liquid jetting device using the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6825543B2 (en) 2000-12-28 2004-11-30 Canon Kabushiki Kaisha Semiconductor device, method for manufacturing the same, and liquid jet apparatus
KR100486072B1 (ko) * 2000-12-28 2005-04-29 캐논 가부시끼가이샤 반도체장치와, 그 제조방법 및 액체분사장치
US7056798B2 (en) 2000-12-28 2006-06-06 Canon Kabushiki Kaisha Semiconductor device, method for manufacturing the same, and liquid jet apparatus
EP2302677A1 (en) 2000-12-28 2011-03-30 Canon Kabushiki Kaisha Method for manufacturing a semiconductor device
JP2014039055A (ja) * 2000-12-28 2014-02-27 Canon Inc 半導体装置およびそれを用いた液体吐出装置
US6867457B2 (en) 2002-07-10 2005-03-15 Canon Kabushiki Kaisha Semiconductor device and liquid jetting device using the same

Also Published As

Publication number Publication date
JPH0243347B2 (enrdf_load_stackoverflow) 1990-09-28

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